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Home crumb_arrow News Center crumb_arrow Semiconductor Wafer Inspection & IC Packaging Solutions – Sensor Chip Testing

Semiconductor Wafer Inspection & IC Packaging Solutions – Sensor Chip Testing

2026-06-03 2026-06-03

Micro Electro Mechanical Systems (MEMS) chips, as well as sensors for physical quantities such as acceleration, pressure, and angular velocity—along with gyroscopes and inertial measurement units—require testing and calibration as a critical step to ensure their proper operation.

Coretech's single‑axis and multi‑axis rotary stages, equipped with slip rings and pneumatic rotary unions of various speeds, can provide excitation across different motion trajectories to enable calibration and testing of sensor chips.



1. HRMS Series Rotary Stage

  • Designed with low‑noise electrical slip rings and pneumatic rotary unions

  • Slotless, brushless high‑torque motor with zero cogging

  • 360° continuous rotation direct‑drive rotary stage

  • Direct‑drive motor with double‑bearing design

  • High‑precision circular grating position feedback

  • Speed exceeding 1500°/s

  • Resolution: 0.02 arc sec; repeatability: ±1 arc sec

  • Optional tabletop diameters: 150 mm, 200 mm, and 260 mm




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2. AB100/150 Series Tip‑Tilt Rotary Stage


  • Tilt/Yaw dual‑axis direct‑drive rotary stage

  • A‑axis (Tilt): limited travel 110° or continuous rotation; B‑axis (Yaw): 360° continuous rotation

  • Brushless, slotless servo motor with excellent speed stability

  • High‑precision circular grating position feedback

  • B‑axis (Yaw) speed exceeding 1000 rpm

  • ±3 arc sec positioning accuracy; ±1 arc sec repeatability

  • Integrated high‑rigidity A/B‑axis design

  • Customisable electrical slip rings and pneumatic rotary unions

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3. G100/200 Optical Mount

  • Two‑axis / three‑axis 360° continuous rotation direct‑drive optical mount (Tx/Ty/Tz)

  • Brushless, slotless servo motor with excellent speed stability

  • High‑precision circular grating position feedback with arc‑second‑level positioning accuracy

  • Optional built‑in electrical slip rings and pneumatic rotary unions

  • Tip/Tilt/Yaw three‑axis or Tilt/Yaw two‑axis rotation options available

  • Large‑diameter open‑frame design: 100 mm / 200 mm diameter


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ACT85LM Series Linear Stage


  • Direct‑drive motor high‑precision positioning stage

  • High‑performance, cost‑effective solution

  • Rugged mechanical structure

  • Flexible configuration options (various travels and feedback)

  • Travel range: 50 mm to 600 mm

  • Maximum speed up to 2000 mm/s; maximum acceleration up to 2 g

  • Configurable with dual movers to increase throughput and efficiency

  • Optional single‑side or dual‑side cable management




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