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MINI-X1-Y1-Z1 Series
6‑Axis Fiber Alignment Stage
The MINI‑X1‑Y1‑Z1 series is a 6‑axis high‑precision motion stage purpose‑built for fiber alignment. It innovatively integrates a compact 3‑axis fine‑adjustment mechanism onto the ART130 series large‑stroke stage (XYZ strokes customizable), enabling coarse positioning over a wide range plus nanometer‑scale fine tuning in one system. Each axis achieves repeatability within ±100 nm. The series is well‑suited for most optical transceiver modules, offering high precision, stability, and cost‑effectiveness for industrial integration.
Unlike conventional piezo‑based micro‑adjustment solutions, our design employs self‑developed linear motors and cross‑roller guides. The MINI axes provide a fine‑motion stroke of ±1 mm and a settling time of 200 μm @ ±50 nm within 30 ms. The combination of ultra‑high precision, compact size, light weight, and extended travel makes it ideal for coupling scenarios that demand frequent, fast, and wide‑range reciprocating motion.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
Self‑developed linear motors and cross‑roller guides for high dynamic performance
High rigidity and load capacity; no wear‑induced drift over long‑term operation
Compact size, simple control architecture, and quick deployment & tuning
Strong immunity to interference, suitable for complex environments
Fast settling time, optimized for frequent, rapid, large‑stroke reciprocating coupling
Significant overall cost advantage, delivering exceptional value for optical module manufacturers
Specifications
Gain a comprehensive understanding of product information
| 轴名称 | X | Y | Z | MINI-X | MINI-Y | MINI-Z |
| 行程 | 60mm | 60mm | 35mm | 1mm | 1mm | 1mm |
| 电子分辨率 | 5nm | |||||
| 定位精度 | ±250nm | ±250nm | ±250nm | ±200nm | ±200nm | ±200nm |
| 重复定位精度 | ±100nm | ±100nm | ±100nm | ±100nm | ±100nm | ±100nm |
| 直线度 | ±1.5μm | ±1.5μm | ±2μm | N/A | N/A | N/A |
| 平面度 | ±1.5μm | ±1.5μm | ±2μm | N/A | N/A | N/A |
| Pitch | 10arcsec | 10arcsec | 10arcsec | N/A | N/A | N/A |
| Yaw | 10arcsec | 10arcsec | 10arcsec | N/A | N/A | N/A |
| 最小步进 | 50nm | |||||
| 定位稳定性 | ±50nm | ±50nm | ±50nm | ±50nm | ±50nm | ±50nm |
| 运动整定时间 | / | 200μm @±50nm@30ms | 200μm @±50nm@30ms | 200μm @±50nm@30ms | ||
| mini轴负载重量 | 500g | |||||
| 最大速度 | 500mm/s | 500mm/s | 500mm/s | 50mm/s | 50mm/s | 50mm/s |
| 平台重量 | 11kg | |||||
| 平台材质 | 铝 | |||||
| 平均无故障时间 | 27,000 Hours | |||||
备注：
(1) 适配-AS反馈，线性放大器;
(2) 空载，需配置相应功率的放大器；
(3) 默认测试点位置为台面上方25mm；
(4) 其余行程可定制。
MINI轴参数
| 轴名称 | MINI-X | MINI-Y | MINI-Z |
| 行程 | 1mm | 1mm | 1mm |
| 电子分辨率 | 5nm | ||
| 定位精度 | ±200nm | ±200nm | ±200nm |
| 重复定位精度 | ±100nm | ±100nm | ±100nm |
| 最小步进 | 50nm | ||
| 定位稳定性 | ±50nm | ±50nm | ±50nm |
| 运动整定时间 | 200μm@±50nm@30ms | 200μm@±50nm@30ms | 200μm@±50nm@30ms |
| 负载重量 | 500g | ||
| 最大速度 | 20mm/s | 20mm/s | 20mm/s |
| 持续推力 | 8.4N | ||
| 峰值推力 | 66.5N | ||
| 平台重量 | 1.3kg | ||
| 平台材质 | 铝 | ||
| 平均无故障时间 | 27,000 Hours | ||
备注：
(1) 适配-AS反馈，线性放大器;
(2) 空载，需配置相应功率的放大器；
(3) 默认测试点位置为台面上方25mm。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 轴名称 | 行程 | 反馈 |
| MINI-X1-Y1-Z1 | MINI-X | -001 | -AS |
| MINI-Y | |||
| MINI-Z |
行程选项
| -001 | 1mm行程 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
MINI轴尺寸图
备注：
（1）单位：mm。
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