FAP Series
The FAP series is a 6‑DOF serial‑structure platform integrating the high‑precision ART95 linear nanopositioning stages and ART130‑20G direct‑drive tip‑tilt stages, delivering exceptional dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 100 Hz. Featuring outstanding industrial design with a compact and refined form, it enables nanometer‑level positioning across 3 to 6 axes. For complex multi‑axis coupling or packaging applications, it provides full‑range ultra‑precision displacement and angular adjustment, offering a complete alignment solution for customers—making it a foundation for high‑volume manufacturing and assembly of photonic devices.
As alignment tolerances for next‑generation silicon photonics devices continue to shrink, the demand for high‑efficiency and high‑precision alignment grows. The FAP series meets both requirements, achieving a minimum step size of 5 nm and speeds up to 400 mm/s. Combined with power meter analog input control, light‑seeking algorithms, appropriate axis configuration, stroke selection, and fixture design, it effectively addresses the alignment needs of next‑generation photonics packaging.
Product Features
Integrated on high‑performance ART series nanopositioning stages
3 to 6 axes in serial motion
All axes feature non‑contact direct‑drive for enhanced throughput
Linear axis minimum step: 5 nm; rotary axis minimum step: 0.05 arcsec
Flexible configuration with multiple options
Analog input interface for industry‑standard power meter integration
Specifications
| 平台型号\Model | FAP-X25-Y25-Z25 | FAP-X50-Y50-Z25 |
| 行程 \Travels | 25mm*25mm*25mm | 50mm*50mm*25mm |
| 绝对定位精度 \Accuracy(1) | ±300nm | ±300nm |
| 双向重复性 \Bidirectional Repeatability(1) | ±150nm | ±150nm |
| 最小步进 \Minimum Incremental Motion(1) | 5nm | 5nm |
| 平台重量 \Load Capacity | 5.0 kg | 6.0 kg |
| 最大负载\Load Capacity | 4.0 kg | 6.0 kg |
| 最大速度 \Maximum Speed | 200mm/s | 400mm/s |
| 平台材质\Material | 铝 | |
| 平均无故障时间\MTBF | 27,000 Hours | |
| 平台型号\Model | FAP-R | FAP-P12 | FAP-T12 |
| 行程 \Travels | 20°/XXX° | 12° | 12° |
| 绝对定位精度 \Accuracy(1) | ±2arcsec | ±10arcsec | ±18arcsec |
| 双向重复性 \Bidirectional Repeatability(1) | ±1arcsec | ±2arcsec | ±4arcsec |
| 最小步进 \Minimum Incremental Motion(1) | 0.1 arcsec | 0.1arcsec | 0.2arcsec |
| 平台重量 \Load Capacity | 7.5 kg(3) | 8.0 kg(4) | 9.0kg(5) |
| 最大轴向负载\Load Capacity | 2.0 kg | 1.5 kg | 1.5kg |
| 最大速度 \Maximum Speed | 150°/s | 150°/s | 150°/s |
| 平台材质\Material | 铝 | ||
| 平均无故障时间\MTBF | 27,000 Hours | ||
备注:
(1)适配-AS反馈;
(2)默认测试点位置为台面上方20mm处;
(3)默认带-X50-Y50-Z25选项;
(4)默认带-X50-Y50-Z25、-R选项;
(5)默认带-X50-Y50-Z25、-P、-T选项;
(6)需配置线性放大器。
Model Selection and Configuration
| 产品系列 | 行程(mm 或 °) | 反馈 |
| FAP | -X25 | -AS |
| -X50 | ||
| -Y25 | ||
| -Y50 | ||
| -Z25 | ||
| -R20 | ||
| -RXXX | ||
| -P12 | ||
| -T12 |
行程选项
| -X25 | X轴25 mm 行程 |
| -X50 | X轴50 mm 行程 |
| -Y25 | Y轴25 mm 行程 |
| -Y50 | Y轴50 mm 行程 |
| -Z25 | Z轴25 mm 行程 |
| -R20 | R轴20° 行程 |
| -RXXX | R轴 定制行程,XXX为客户指定 |
| -P12 | P轴12° 行程 |
| -T12 | T轴12° 行程 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
Product Dimensions

备注:
(1)单位:mm;
(2)线缆接头未显示。
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