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MicroL-Z Series
XYZ Integrated Stage, Ideal for Biological Tissue Observation and Film Thickness Measurement
The MicroL‑Z is a sub‑micron precision XYZ integrated positioning stage featuring a 3‑axis integrated design, which can be separated into a large‑clear‑aperture XY stage and a standalone Z‑axis upon request. Driven by direct‑drive linear motors without leadscrew transmission, the XY axes deliver excellent dynamic performance for fast scanning and settling. The Z‑axis offers rapid dynamic focusing capability, completing a 1 μm step and settling to within ±150 nm in just 150 ms.
The MicroL‑Z series features a large clear aperture, with a maximum opening of 150 mm × 100 mm, making it well‑suited for biological tissue observation and film thickness measurement. While the XY axes perform raster scanning, the Z‑axis executes focusing motion as needed to ensure precise image capture. In applications with shallow depth of field, the fast coordination of step settling and focusing significantly improves efficiency and image quality.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
Direct‑drive linear motors, zero leadscrew backlash
XY axes for fast scanning and settling; Z‑axis with dynamic focusing capability
3‑axis integrated design, low profile, minimal Abbe error
Large clear aperture: up to 150 mm × 100 mm
XY travel: 115 mm × 75 mm; Z‑axis stroke: 1.5 mm or 5 mm
Repeatability: ±0.5 μm; accuracy: ±1.5 μm
XYZ can be used as a 3‑axis unit or with Z‑axis separated
Specifications
Gain a comprehensive understanding of product information
| 轴号 | X | Y | Z | |
| 有效行程\Travel | 115mm | 75mm | 1.5mm | 5mm |
| 定位精度\Accuracy | ±1.5 μm | ±1.5 μm | ±1 μm | |
| 重复定位精度\Bi-Repeatability | ±0.5 μm | ±0.5 μm | ±0.5 μm | |
| 俯仰\Pitch | 20 arc sec | 20 arc sec | 10 arc sec | 20 arcsec |
| 偏摆\Yaw | 40 arc sec | 40 arc sec | 10 arc sec | 20 arcsec |
| 直线度\Straightness | ±4 μm | ±4 μm | ±2 μm | ±4 μm |
| 平面度\Flatness | ±4 μm | ±4 μm | ±2 μm | ±4 μm |
| 正交性\Orthogonality | 15 arc sec | NA | ||
| 最大速度\Maximum Speed（1） | 200 mm/s | 30 mm/s | ||
| 最大加速度\Maximum Acceleration（1） | 0.5 g | 0.5 g | 0.3 g | |
| 持续推力\Continuous Force | 21 N | 21 N | 21 N | |
| 峰值推力\Peak Force | 147 N | 147 N | 147 N | |
| 最大负载\Load Capacity | 3 kg | |||
| 平台重量\Stage Mass(No Motor) | 5kg | |||
| 最小步进量\Minimum Incremental step | 100 nm | |||
| 平台材质\Material | 铝 | |||
| 平均无故障时间\MTBF | 27,000 Hours | |||
备注：
（1）空载测试；
（2）适配-AS反馈，配置线性放大器；
（3）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
（4）其他行程可定制。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 轴名称 | 行程 | 反馈 |
| Micro | -L | -115-75 | -AS |
| -Z | -0015 | -TTL010 | |
| -005 | -TTL005 |
轴名称
| -L | XY轴 |
| -Z | Z轴 |
行程选项
| -115-75 | XY轴行程 115 mm*75 mm |
| -0015 | Z轴行程 1.5 mm |
| -005 | Z轴行程 5 mm |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -TTL010 | 10nm分辨率数字量TTL信号输入 |
| -TTL005 | 5nm分辨率数字量TTL信号输入 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
MicroL-1.5Z
MicroL-5Z
备注：
（1）单位：mm；
（2）线缆接头未显示。
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