The ZR100 is a compact two‑axis (Z/Theta) precision positioning stage. The Z‑axis is driven by dual linear motors with dual air‑cylinder counterbalancing, allowing adjustable pneumatic pressure to match varying load weights. It employs precision cross‑roller guides, delivering excellent performance and positioning accuracy, with a no‑load cutoff frequency exceeding 100 Hz and outstanding velocity stability. The Theta axis is powered by a direct‑drive rotary motor, equipped with circular guides and an optical encoder, combining high speed with high precision. Its recessed, low‑profile design minimizes the overall height, and the lowered working point helps maintain accuracy in real‑world applications.

The ZR100 offers both point‑to‑point static positioning and exceptional dynamic accuracy, making it ideal for demanding bio‑detection or wafer inspection scanning applications that require tight dynamic following errors. The Theta axis features a 32 mm hollow bore, enabling white‑light confocal sensors to pass through for double‑sided inspection. The Z‑axis can adjust in real time to follow the sensor’s focus height, comprehensively addressing complex motion control challenges.