The VC60‑5 is a nanometer‑precision vertical lift stage driven by a linear motor with crossed‑roller guides, delivering excellent dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 120 Hz.

As a key complement to the ART130 horizontal stages, the VC60‑5 can be combined with the ART130 or ART130XY to form various multi‑axis configurations. In demanding fast‑focusing applications, its outstanding dynamics meet stringent requirements. For example, in gene sequencing, with a 350 g load performing a 20 μm amplitude reciprocating motion at 10 Hz sinusoidal frequency, the dynamic following error remains below 1 μm—measured at 0.78 μm—enabling rapid and accurate real‑time focusing.

Despite its compact design, the VC60‑5 delivers robust performance, reaching a maximum speed of 80 mm/s and unloaded acceleration of 0.5 g. When equipped with linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 10 nm. Typical applications include fiber‑optic coupling, wafer defect inspection, gene sequencing, and more—with flexible customization available per customer needs.