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ART130V-5 Series
High‑Precision Direct‑Drive Vertical Lift Stage
The ART130V‑5 is a nanometer‑precision vertical lift stage driven by a linear motor with crossed‑roller guides, delivering excellent dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 150 Hz.
As a key complement to the ART130 horizontal stages, the ART130V‑5 can be combined with the ART130 or ART130XY to form various multi‑axis configurations. In demanding fast‑focusing applications, its outstanding dynamics meet stringent requirements. For example, in gene sequencing, with a 1.7 kg load, a 1 μm step settles to within ±50 nm in just 15 ms—including acceleration, deceleration, and settling—enabling rapid and accurate real‑time focusing.
Despite its compact design, the ART130V‑5 delivers robust performance, reaching a maximum speed of 75 mm/s and unloaded acceleration of 0.7 g. When equipped with linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 5 nm. Typical applications include fiber‑optic coupling, wafer defect inspection, gene sequencing, and more—with flexible customization available per customer needs.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
High‑precision direct‑drive vertical lift stage
High dynamic performance
(unloaded crossover frequency > 150 Hz)
Crossed‑roller guides
No air cylinder counterbalance required
Rich combination options
(ART130 series XZ, XYZ configurations)
Resolution: 1 nm; repeatability: ±100 nm; accuracy: ±200 nm
In‑position stability: 5 nm
(with linear amplifiers and vibration‑isolated lab environment)
Specifications
Gain a comprehensive understanding of product information
| 平台型号\Model | ART130V-5 |
| 有效行程\Travel | 5 mm |
| 绝对定位精度\Accuracy | ±200 nm |
| 双向重复定位精度\Bi-Repeatability | ±100 nm |
| 单向重复定位精度\Uni-Repeatability | ±45 nm |
| 俯仰\Pitch | 20 arc sec |
| 横滚\Roll | 10 arc sec |
| 偏摆\Yaw | 10 arc sec |
| 直线度\Straightness （1） | ±1.0 µm |
| 平台重量\Stage Mass | 3 kg |
| 最大负载\Load Capacity（2） | 3 kg |
| 分辨率\Resolution | 1 nm |
| 最小步进量\Minimum Incremental step（3） | 5 nm |
| 在位稳定性\In Position Stability （3） | 5 nm |
| 最大速度\Maximum Speed（4） | 75 mm/s |
| 最大加速度\Maximum Acceleration （4） | 0.7 g |
| 持续推力\Continuous Force | 100 N |
| 平台材质\Material | 铝 |
| 平均无故障时间\MTBF | 27,000 Hours |
备注：
（1）平行或垂直于楔形块方向测量；
（2）沿轴线方向受力；
（3）适配-AS反馈，配置线性放大器；
（4）空载测试；
（5）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 行程（mm） | 反馈 |
| ART130V-5 | -5 | -AS |
行程选项
| -5 | 5mm行程 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
备注：
（1）单位：mm；
（2）线缆接头未显示。
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