The ART130SZ series is a nanometer‑precision vertical motion stage, driven by linear motors with crossed‑roller guides, delivering exceptional dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 100 Hz.

Its ultra‑thin design effectively saves installation space, making it an ideal complement to the ART130 series horizontal nanopositioning stages. The dual‑cylinder counterbalance design not only provides a clean aesthetic but also balances the load weight, effectively preventing motor overheating during prolonged operation—making it the preferred choice for Z‑axis nanopositioning stages requiring high stiffness and reliability.

Despite its compact construction, the ART130SZ delivers robust driving capability, reaching a maximum speed of 500 mm/s and unloaded acceleration of 1 g. When equipped with linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability of 3 nm and a minimum step size below 5 nm. Typical applications include fiber‑optic coupling in telecommunications, wafer defect inspection in semiconductors, gene sequencing in biotechnology, and laser micro/nano machining—with flexible customization available per customer needs.