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ALP Series
Air‑Bearing Rotary Stage with Optional 4‑Channel Pneumatic Rotary Union
The ALP series is a high‑precision air‑bearing direct‑drive rotary stage powered by a rotary motor, delivering excellent dynamic performance and positioning accuracy. Beyond industry‑leading axial, radial, and tilt error motion, the ALP offers exceptional absolute angular accuracy, repeatability, high rotational speed, and load capacity—making it easy to integrate into multi‑axis systems.
Featuring outstanding industrial design, the ALP has a 150 mm table diameter, a 30 mm clear aperture, and a thickness of just 95 mm while maintaining high performance. Equipped with a high‑precision circular grating feedback, it achieves positioning accuracy better than ±2 arcsec, with axial and radial runout below 250 nm. Powered by CoreTech’s proprietary compact direct‑drive motor, it reaches speeds up to 1200 rpm. With linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 0.5 arcsec. Typical applications include dimensional metrology, semiconductor inspection, synchrotron research, precision manufacturing, optical alignment, and system calibration—wherever arcsec‑level positioning is required.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
Slotless, brushless servo direct‑drive motor
Optimized design minimizing axial, radial, and tilt error motions
Superior positioning performance, speed stability, and high‑resolution feedback
Non‑contact air bearings for ultra‑precise motion
Low‑profile, flat design with optional 4‑channel pneumatic rotary union
Sub‑arcsec positioning accuracy
Axial and radial runout < 250 nm
Specifications
Gain a comprehensive understanding of product information
| 平台型号\Model | ALP150 | |
| 载物台直径\ Tabletop Diameter | 150 mm | |
| 高度\Stage Height | 95mm | |
| 中空尺寸\Aperture | 30mm | |
| 转角精度\Accuracy | ±2 arc sec | |
| 重复性\ Repeatability | ±1 arc sec | |
| 轴跳\Axial Error Motion | 250 nm | |
| 径跳\Radial Error Motion | 250 nm | |
| 最小步进量\Minimum Incremental step（1） | 0.5 arcsecc | |
| 在位稳定性\In Position Stability （1） | 0.5 arcsec | |
| 持续扭矩\Continuous Torque | 3.7 N.m | |
| 峰值扭矩\Maximum Torque | 14.6 N.m | |
| 最大负载\Max Load | 轴向\Axial | 30 kg |
| 径向\Radial | 15 kg | |
| 最高转速\ Maximum Speed（2） | 1200rpm | |
| 转台重量\ Stage Mass | 5.5 kg | |
| 供气要求\ Aire Requirement（4）（5） | 80psi±5psi，加小于0.25μm空气过滤器 | |
| 平台材质\Material | 铝 | |
| 平均无故障时间\MTBF | 27,000 Hours | |
备注：
(1) 适配-AS反馈，配置线性放大器；
(2) 空载，需配置相应功率的放大器；
(3) 默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
(4) 气缸供气需配置空滤三联件，必须清洁、干燥，过滤至0.25μm以下颗粒，建议使用纯度为99.9%的氮气。气压根据平台实际负载重量可调。
(5) 为了防止空气轴承气压不足，建议安装气压开关，信号输入到运动控制器连接急停（E-STOP）端口。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 台面直径 | 反馈 |
| ALP | -150 | -AS |
| -TTL50 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -TTL50 | TTL 50倍细分 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
备注：
(1)单位：mm。
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