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SMH115LM系列
Cost-Effective Mechanical Direct-Drive Linear Stage
The SMH115LM series is powered by a linear motor, delivering high speed, superior dynamics, and low friction—ideal for precise position control in long-stroke, high-velocity, and high-accuracy applications.
Equipped with high-resolution optical scales (electronic resolution down to 1 nm), the SMH115LM achieves sub-micron repeatability and positioning accuracy through calibration. Its low-friction side seals protect against dust and particles, ensuring long-term reliability and extended maintenance intervals. Cable management options are available, and the side seal design simplifies routine upkeep.
As a critical component in precision machinery, the SMH115LM is widely used in OLED cutting, PCB drilling, CNC machining, biotechnology, IC packaging, and surface metrology—offering a robust solution that combines precision positioning, high speed, and heavy load capacity.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
Direct-drive motor for high-precision positioning
Cost-effective solution
Rugged mechanical construction
Flexible configurations (various strokes, table sizes, and feedback options)
Stroke range: 50 mm to 600 mm
Max speed: 1000 mm/s; max acceleration: 1 g
Optional single-sided or dual-sided cable management
Specifications
Gain a comprehensive understanding of product information
| 平台型号\Model | SMH115LM-050 | SMH115LM-100 | SMH115LM-150 | SMH115LM-200 | |
| 有效行程\Travel | 50mm | 100mm | 150mm | 200mm | |
| 绝对定位精度\Accuracy | ±0.75 μm | ±1 μm | ±1 μm | ±1.5 μm | |
| 双向重复定位精度\Bi-Repeatability | ±0.4 μm | ±0.4 μm | ±0.4 μm | ±0.5 μm | |
| 俯仰\Pitch | 5 arc sec | 6 arc sec | 7 arc sec | 8 arc sec | |
| 横滚\Roll | 5 arc sec | 6 arc sec | 7 arc sec | 8 arc sec | |
| 偏摆\Yaw | 5 arc sec | 6 arc sec | 7 arc sec | 8 arc sec | |
| 直线度\Straightness | ±1.5 µm | ±2.5 µm | ±3 μm | ±4 μm | |
| 平面度\Flatness | ±1.5 µm | ±2.5 µm | ±3 μm | ±4 μm | |
| 平台重量\Stage Mass | 5.2 kg | 5.7 kg | 6.3 kg | 6.8 kg | |
| 最大负载\Load Capacity | 水平安装 | 40kg | |||
| 侧向安装 | 40kg | ||||
| 分辨率\Resolution（1） | 1nm | ||||
| 最小步进\Minimal Incremental Step（1） | 20nm | ||||
| 在位稳定性\In Position Stability （1） | ±10nm | ||||
| 最大速度\Maximum Speed（2） | 1m/s | ||||
| 最大加速度\Maximum Acceleration（2） | 1g | ||||
| 持续推力\Continuous Force | 31N | ||||
| 峰值推力\Peak Force | 217N | ||||
| 平台材质\Material | 铝 | ||||
| 平均无故障时间\MTBF | 27,000 Hours | ||||
| 平台型号\Model | SMH115LM-300 | SMH115LM-400 | SMH115LM-500 | SMH115LM-600 | |
| 有效行程\Travel | 300mm | 400mm | 500mm | 600mm | |
| 绝对定位精度\Accuracy | ±1.5 μm | ±1.5 μm | ±2 μm | ±2 μm | |
| 双向重复定位精度\Bi-Repeatability | ±0.5 μm | ±0.5 μm | ±0.5 μm | ±0.5 μm | |
| 俯仰\Pitch | 12 arc sec | 16 arc sec | 20 arc sec | 24 arc sec | |
| 横滚\Roll | 12 arc sec | 16 arc sec | 20 arc sec | 24 arc sec | |
| 偏摆\Yaw | 12 arc sec | 16 arc sec | 20 arc sec | 24 arc sec | |
| 直线度\Straightness | ±6 μm | ±8 μm | ±9 μm | ±10 μm | |
| 平面度\Flatness | ±6 μm | ±8 μm | ±9 μm | ±10 μm | |
| 平台重量\Stage Mass | 8 kg | 9 kg | 10.4 kg | 11.5 kg | |
| 最大负载\Load Capacity | 水平安装 | 40kg | |||
| 竖直安装 | 40kg | ||||
| 分辨率\Resolution（1） | 1nm | ||||
| 最小步进\Minimal Incremental Step（1） | 20nm | ||||
| 在位稳定性\In Position Stability （1） | ±10nm | ||||
| 最大速度\Maximum Speed（2） | 2m/s | ||||
| 最大加速度\Maximum Acceleration（2） | 2g | ||||
| 最大推力\Maximum Force | 31N | ||||
| 持续推力\Continuous Force | 217N | ||||
| 峰值推力\Peak Force | 铝 | ||||
| 平均无故障时间\MTBF | 27,000 Hours | ||||
备注：
（1）适配-AS反馈，以线性放大器；
（2）空载，需配置相应功率的放大器；
（3）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 行程（mm） | 载物台 | 反馈 | 电缆管理 |
| SMH115LM | -50 | -TTM | -AS | -CMS0 |
| -100 | -TTR | -TTL010 | -CMS1 | |
| -150 | -TTKxx | -TTL100 | -CMS2 | |
| -200 | ||||
| -300 | ||||
| -400 | ||||
| -500 | ||||
| -600 |
行程选项
| -50 | 50mm行程 |
| -100 | 100mm行程 |
| -150 | 150mm行程 |
| -200 | 200mm行程 |
| -300 | 300mm行程 |
| -400 | 400mm行程 |
| -500 | 500mm行程 |
| -600 | 600mm行程 |
载物台选项
| -TTM | 载物台公制安装孔 |
| -TTR | 载物台安装孔位，为指定转台设计 |
| -TTKxx | 为客户定制载物台 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -TTL010 | 10nm分辨率数字量TTL信号输入 |
| -TTL100 | 0.1μm分辨率数字量TTL信号输入 |
电缆管理选项
| -CMS0 | 无电缆管理，仅留出电机反馈接头 |
| -CMS1 | 单侧托线板、单拖链 |
| -CMS2 | 双侧托线板、双拖链 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
| 型号 BASIC MODEL | 标称行程 NOMINAL TRAVEL | 电子限位行程 ELEC LIMIT TRAVEL | 机械限位行程 MECH LIMIT TRAVEL | A | B |
| SMH115LM-050 | 50 | 57-63 | 75 | 280 | 150 |
| SMH115LM-100 | 100 | 107-113 | 125 | 330 | 100250 |
| SMH115LM-150 | 150 | 157-163 | 175 | 380 | 100300 |
| SMH115LM-200 | 200 | 207-213 | 225 | 430 | 100350 |
| SMH115LM-300 | 300 | 307-313 | 325 | 530 | 100250450 |
| SMH115LM-400 | 400 | 407-413 | 425 | 630 | 100300500 |
| SMH115LM-500 | 500 | 507-513 | 525 | 730 | 100350600 |
| SMH115LM-600 | 600 | 607-613 | 625 | 830 | 100400700 |
备注：
（1）单位：mm；
（2）双侧拖链配置未显示。
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