ASP Series
The ASP series is a high‑precision air‑bearing direct‑drive rotary stage powered by a rotary motor, delivering excellent dynamic performance and positioning accuracy. Beyond industry‑leading axial, radial, and tilt error motion, it offers exceptional absolute angular accuracy, repeatability, and load capacity—easy to integrate into multi‑axis systems. Featuring outstanding industrial design, the ASP is available with table diameters of 100 mm and 150 mm, with other sizes customizable upon request. Equipped with high‑precision circular grating feedback, it achieves positioning accuracy better than ±1.5 arcsec, with axial and radial runout below 250 nm, demonstrating outstanding mechanical performance.
Powered by CoreTech’s proprietary direct‑drive motor with high torque and strong driving capability, the ASP achieves an unloaded speed exceeding 5000 rpm. With linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 0.5 arcsec. Typical applications include dimensional metrology, wafer spiral inspection, biological sample processing and observation, synchrotron research, precision manufacturing, optical alignment, and system calibration—wherever arcsec‑level positioning is required.
Product Features
Optimized design minimizing axial, radial, and tilt error motions
Superior positioning performance, speed stability, and high‑resolution feedback
Non‑contact air bearings for ultra‑precise motion
Max speed: 5000 rpm
Sub‑arcsec positioning accuracy
Axial and radial runout < 250 nm
Optional pneumatic rotary union and air tubing available upon request
Specifications
| 平台型号\Model | ASP100 | ASP150 | |
| 载物台直径\ Stage Diameter | 100 mm | 150 mm | |
| 转角精度\Accuracy | ±1.5 arc sec | ±1.5 arc sec | |
| 重复性\ Repeatability | ±0.75 arc sec | ±0.75 arc sec | |
| 轴跳\Axial Error Motion | 250 nm | 250 nm | |
| 径跳\Radial Error Motion | 250 nm | 250 nm | |
| 最小步进量\Minimum Incremental step(2) | 0.5 arcsec | 0.5 arcsec | |
| 在位稳定性\In Position Stability (2) | 0.5 arcsec | 0.5 arcsec | |
| 持续扭矩\Continuous Torque | 0.7 N.m | 3 N.m | |
| 峰值扭矩\Maximum Torque | 3 N.m | 10 N.m | |
| 平台重量\Stage Mass | 8 kg | 13 kg | |
| 最大负载\Max Load | 轴向\Axial | 6 kg | 10 kg |
| 径向\Radial | 3 kg | 5 kg | |
| 最高转速\ Maximum Speed(1) | 5000rpm | 5000rpm | |
| 耗气量\Air Consumption | 15 SLPM | 18 SLPM | |
| 供气要求\ Aire Requirement(4)(5) | 5.3bar±0.2bar,加小于0.25μm空气过滤器 | ||
| 平台材质\Material | 铝 | ||
| 平均无故障时间\MTBF | 27,000 Hours | ||
备注:
(1) 适配-AS反馈,配置线性放大器;
(2) 空载,需配置相应功率的放大器;
(3) 默认测试点位置为台面上方25 mm,单轴指标,多轴系统的性能指标与实际载荷和工作点位置有关;
(4) 气缸供气需配置空滤三联件,必须清洁、干燥,过滤至0.25μm以下颗粒,建议使用纯度为99.9%的氮气。气压根据平台实际负载重量可调。
(5) 为了防止空气轴承气压不足,建议安装气压开关,信号输入到运动控制器连接急停(STO)端口。
Model Selection and Configuration
| 产品系列 | 台面直径 | 反馈 |
| ASP | -100 | -AS |
| -150 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
旋转单元选项
| -RU1 | 1路负压气管旋转单元 |
| -RU2 | 2路负压气管旋转单元 |
Product Dimensions
ASP-100

ASP-150

备注:
(1)单位:mm。
Contact us to build your customized precision motion solution.