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ASP Series

High‑Speed Air‑Bearing Rotary Stage, Max Speed 5000 rpm

The ASP series is a high‑precision air‑bearing direct‑drive rotary stage powered by a rotary motor, delivering excellent dynamic performance and positioning accuracy. Beyond industry‑leading axial, radial, and tilt error motion, it offers exceptional absolute angular accuracy, repeatability, and load capacity—easy to integrate into multi‑axis systems. Featuring outstanding industrial design, the ASP is available with table diameters of 100 mm and 150 mm, with other sizes customizable upon request. Equipped with high‑precision circular grating feedback, it achieves positioning accuracy better than ±1.5 arcsec, with axial and radial runout below 250 nm, demonstrating outstanding mechanical performance.

Powered by CoreTech’s proprietary direct‑drive motor with high torque and strong driving capability, the ASP achieves an unloaded speed exceeding 5000 rpm. With linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 0.5 arcsec. Typical applications include dimensional metrology, wafer spiral inspection, biological sample processing and observation, synchrotron research, precision manufacturing, optical alignment, and system calibration—wherever arcsec‑level positioning is required.


Features Specifications Configuration Dimensions

Product Features

Hard-Core Capabilities Drive Exceptional Performance
Optimized design minimizing axial, radial, and tilt error motions Optimized design minimizing axial, radial, and tilt error motions

Optimized design minimizing axial, radial, and tilt error motions

Superior positioning performance, speed stability, and high‑resolution feedback Superior positioning performance, speed stability, and high‑resolution feedback

Superior positioning performance, speed stability, and high‑resolution feedback

Non‑contact air bearings for ultra‑precise motion Non‑contact air bearings for ultra‑precise motion

Non‑contact air bearings for ultra‑precise motion

Max speed: 5000 rpm Max speed: 5000 rpm

Max speed: 5000 rpm

Sub‑arcsec positioning accuracy Sub‑arcsec positioning accuracy

Sub‑arcsec positioning accuracy

Axial and radial runout < 250 nm Axial and radial runout < 250 nm

Axial and radial runout < 250 nm

Optional pneumatic rotary union and air tubing available upon request Optional pneumatic rotary union and air tubing available upon request

Optional pneumatic rotary union and air tubing available upon request

Specifications

Gain a comprehensive understanding of product information
平台型号\ModelASP100ASP150
载物台直径\ Stage Diameter100 mm150 mm
转角精度\Accuracy±1.5 arc sec±1.5 arc sec
重复性\ Repeatability±0.75 arc sec±0.75 arc sec
轴跳\Axial Error Motion250 nm250 nm
径跳\Radial Error Motion250 nm250 nm
最小步进量\Minimum Incremental step(2)0.5 arcsec0.5 arcsec
在位稳定性\In Position Stability (2)0.5 arcsec0.5 arcsec
持续扭矩\Continuous Torque0.7 N.m3 N.m
峰值扭矩\Maximum Torque3 N.m10 N.m
平台重量\Stage Mass8 kg13 kg
最大负载\Max Load轴向\Axial6 kg10 kg
径向\Radial3 kg5 kg
最高转速\ Maximum Speed(1)5000rpm5000rpm
耗气量\Air Consumption15 SLPM18 SLPM
供气要求\ Aire Requirement(4)(5)5.3bar±0.2bar,加小于0.25μm空气过滤器
平台材质\Material
平均无故障时间\MTBF27,000 Hours

备注:

(1) 适配-AS反馈,配置线性放大器;

(2) 空载,需配置相应功率的放大器;

(3) 默认测试点位置为台面上方25 mm,单轴指标,多轴系统的性能指标与实际载荷和工作点位置有关;

(4) 气缸供气需配置空滤三联件,必须清洁、干燥,过滤至0.25μm以下颗粒,建议使用纯度为99.9%的氮气。气压根据平台实际负载重量可调。

(5) 为了防止空气轴承气压不足,建议安装气压开关,信号输入到运动控制器连接急停(STO)端口。


Model Selection and Configuration

Scientifically Formulated, Precisely Tailored to Your Needs
产品系列台面直径反馈
ASP-100-AS
-150


反馈选项


-ASVPP 1伏正弦模拟量输入


旋转单元选项


-RU11路负压气管旋转单元
-RU22路负压气管旋转单元


Product Dimensions

Precise measurements—dimensions are clear at a glance



  ASP-100



  ASP-150


  备注:

  (1)单位:mm。



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