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UCS100SD Series
High‑Flexibility Leadscrew‑Driven Linear Stage
The UCS100SD series is a high‑precision positioning stage driven by an AC brushless servo motor with a ball screw, featuring a low profile and compact design. It offers near‑direct‑drive accuracy with greater flexibility in use: it can serve as a horizontal linear axis or, with an optional brake, be mounted vertically as a Z‑axis alongside other stages. Horizontal load capacity is 25 kg; side‑mounted or vertical load capacity is 10 kg. Feedback is provided by a rotary encoder with resolution below 0.1 μm.
As a high‑precision screw‑driven stage, the UCS100SD is distinguished by its low profile, compactness, and rugged durability—with a travel life exceeding 2500 km. It delivers high resolution and repeatability, making it ideal for semiconductor wafer testing and manufacturing, automated microscope observation systems, and high‑precision micro‑positioning applications.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
Servo motor with ball screw drive
Low profile and compact design
Rugged mechanical construction
（Flexible configuration for XY or XYZ three‑axis subsystems）
Stroke range: 50 mm to 200 mm
(rotary encoder feedback option available)
Optional brake with power‑off self‑locking function
Specifications
Gain a comprehensive understanding of product information
| 平台型号\Model | UCS100SD-050 | UCS100SD -100 | UCS100SD-150 | |
| 有效行程\Travel | 50 mm | 100 mm | 150 mm | |
| 绝对定位精度\Accuracy (校准后) | ±0.5 μm | ±0.75 μm | ±1.0 μm | |
| 双向重复定位精度\Bi-Repeatability | ±0.3 μm | ±0.3 μm | ±0.3 μm | |
| 俯仰\Pitch | 6 arc sec | 8 arc sec | 10 arc sec | |
| 偏摆\Yaw | 6 arc sec | 8 arc sec | 10 arc sec | |
| 直线度\Straightness | ±1.25 µm | ±1.5 µm | ±1.75 µm | |
| 平面度\Flatness | ±1.25 µm | ±1.5 µm | ±1.75 µm | |
| 平台重量\Stage Mass(No Motor) | 1.5 kg | 1.7 kg | 1.9 kg | |
| 最大负载\Load Capacity（1） | 水平 | 25 kg | ||
| 竖直 | 10 kg | |||
| 分辨率\Resolution | 旋转编码器 | 0.1 μm （2） | ||
| 最大速度\Maximum Speed（3） | 80 mm/s | |||
| 平台材质\Material | 铝 | |||
备注：
（1）有效载荷指标适用于单轴系统，并受限于2500公里行程的丝杠和滚珠寿命。
（2）适配RTTL5000反馈选项；
（3）使用占空比过高可能会影响精度；
（4）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
（5）多轴配置或定制应用指标咨询厂商。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 行程（mm） | 载物台 | 反馈 |
| UCS100SD | -50 | -TTM | -RTTL5000 |
| -100 | -TTR | -RTTL2500 | |
| -150 | -TTKxx | ||
行程选项
| -50 | 50 mm行程 |
| -100 | 100 mm 行程 |
| -150 | 150 mm行程 |
载物台选项
| -TTM | 载物台公制安装孔 |
| -TTR | 载物台安装孔位，为指定转台设计 |
| -TTKxx | 为客户定制载物台 |
反馈选项
| -RTTL5000 | 2500线旋转编码器 |
| -RTTL2500 | 2500线旋转编码器 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
UCS100SD-050
UCS100SD-100
UCS100SD-150
备注：
（1）单位：mm；
（2）线缆接头未显示。
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