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Surface Series
High‑Precision Air‑Bearing Gantry
The Surface series is a high‑precision, high‑dynamic planar air‑bearing stage featuring XY dual air‑bearing guides with positive/negative pressure design and air‑wrapped preload. The negative pressure balances the upward lift and downward preload forces, maintaining proper air gap. Its geometric performance is outstanding, with pitch and yaw deviations below 2 arcsec.
The dual air‑bearing design significantly enhances load capacity and stiffness, achieving a first natural frequency exceeding 330 Hz and an unloaded crossover frequency above 100 Hz—enabling high‑speed, efficient motion while reducing settling time.
Both the dual‑drive axes and the crossbeam axis adopt an air‑guide H‑bridge configuration. The friction‑free design delivers exceptional dynamics and efficiency, with a maximum speed of 2 m/s and acceleration of 2 g. Travel ranges are customizable, and the Surface series can be combined with SurfaceZ and SurfaceTheta to form X‑Y‑Z‑Theta multi‑axis systems, suitable for various wafer inspection applications.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
High dynamic performance
(crossover frequency > 330 Hz)
H‑type structure with air guides on both dual‑drive axes and crossbeam axis
Flexible configurations
(customizable XY travel)
XY planar design, low profile, minimal Abbe error
Max speed: 2 m/s; max acceleration: 2 g
Resolution: 1 nm; repeatability: ±100 nm; accuracy: ±250 nm
High‑precision zero‑expansion optical scale feedback with low thermal drift susceptibility
Specifications
Gain a comprehensive understanding of product information
| 平台型号\Model | Surface350-350 | |
| 有效行程\Travel | 350mm * 350mm | |
| 定位精度\Accuracy（1） | ±250 nm | |
| 重复定位精度\Bi-Repeatability（1） | ±100 nm | |
| 俯仰\Pitch | 3 arc sec | |
| 横滚\Roll | 3 arc sec | |
| 偏摆\Yaw | 3 arc sec | |
| 持续推力\Continuous Force | 横梁轴 | 205.5 N |
| 双驱轴 | 252.2 N*2 | |
| 峰值推力\Peak Force | 横梁轴 | 1228.8 N |
| 双驱轴 | 1395 N*2 | |
| 正交性\Orthogonality | 2 arc sec | |
| 刚性-一阶自然频率（带载）\Stiffness, First Natural Frequency (Rated Payload) | 大于330Hz | |
| 直线度\Straightness | ±1.0 µm | |
| 平面度\Flatness | ±1.5 µm | |
| 最大负载\Load Capacity | 30 kg | |
| 分辨率\Resolution（1） | 1 nm | |
| 最大速度\Maximum Speed（2） | 2000 mm/s | |
| 最大加速度\Maximum Acceleration（2） | 2g | |
备注：
（1）适配-ASH反馈，配置线性放大器；
（2）空载，需配置相应功率的放大器，最大速度受限于反馈分辨率；
（3）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
（4）气缸供气需配置空滤三联件，必须清洁、干燥，过滤至0.25μm以下颗粒，建议使用纯度为99.9%的氮气。气压根据平台实际负载重量可调。
（5）为了防止空气轴承气压不足，建议安装气压开关，信号输入到运动控制器连接急停（E-STOP）端口。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 行程（mm） | 光栅尺编码方式 |
| Surface | -350-350 | -AS |
| -350-500 | -TTL100 | |
| -400-500 | -TTL010 | |
| -500-650 | -TTL005 | |
| -ASH |
行程选项
| -700 | 双驱轴：350 mm 行程，横梁轴：350mm行程 |
| -850 | 双驱轴：350 mm 行程，横梁轴：500mm行程 |
| -900 | 双驱轴：400 mm 行程，横梁轴：500mm行程 |
| -1150 | 双驱轴：500 mm 行程，横梁轴：650mm行程 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -TTL100 | 0.1μm分辨率数字量TTL信号输入 |
| -TTL010 | 10nm分辨率数字量TTL信号输入 |
| -TTL005 | 5nm分辨率数字量TTL信号输入 |
| -ASH | 高精度零膨胀光栅尺，VPP 1伏正弦模拟量输入 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
备注：
（1）单位：mm；
（2）Surface Z\Surface -Theta未显示。
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