The ART165 series is a motion stage with nanometer‑level positioning accuracy, driven by a self‑developed linear motor and guided by crossed‑roller bearings. It delivers excellent dynamic performance and positioning accuracy, with an unloaded cutoff frequency exceeding 100 Hz. Travel can be customized to customer requirements. It can be used as a single‑axis stage or combined with the ART165V‑5 lift stage or RSML rotary stage to form various multi‑axis configurations for specific applications.

Despite its compact design, the ART165 series offers strong drive capability, with a maximum speed of 500 mm/s and acceleration up to 1 g. When configured with linear amplifiers in a vibration‑isolated lab environment, the stage achieves in‑position stability of 3 nm and a minimum step size of less than 5 nm. It is widely used in fiber‑optic coupling in telecommunications, wafer defect inspection in semiconductor manufacturing, gene sequencing in biomedical research, and laser micro/nano machining. Customized solutions are available based on application requirements.

The sophisticated mechanical design ensures exceptional accuracy and dynamic performance, particularly in applications demanding stringent velocity stability. For example, in scanning inspection requiring a constant linear speed of 20 mm/s over a travel of 130 mm, the ART165 series maintains a dynamic following error of less than ±100 nm during the constant‑velocity phase, reliably fulfilling the task.