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ZTT-V2 Series
3‑Axis Integrated Leveling Stage for Wafer Inspection, Optical Table Adjustment, High‑Magnification Microscope Stages
The ZTT‑V2 is a three‑axis (Z, tip, tilt) precision positioning stage that integrates vertical lift and horizontal leveling. Driven by linear motors and coupled via precision spherical hinges, it delivers excellent fine‑motion accuracy and dynamic performance. With a low profile, compact footprint, high rigidity, and a 10 kg load capacity, it is compatible with cleanroom environments.
The ZTT‑V2 offers both point‑to‑point static positioning and outstanding dynamic accuracy, making it ideal for applications with stringent fine‑motion and dynamic following error requirements—such as wafer inspection, optical alignment, panel inspection, or maskless lithography. Real‑time adjustment of height and angular orientation based on sensor focus height comprehensively addresses complex motion control challenges.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
Integrated Z‑lift and tip‑tilt leveling in one platform
Spherical hinge coupling for multi‑axis coordinated control
Compact structure with low side profile
Z‑axis minimum step size 20 nm; tip‑tilt minimum step 0.05 arcsec
Linear motor drive for superior dynamic performance
Specifications
Gain a comprehensive understanding of product information
| 轴名称 | Z | θx | θy |
| 有效行程\Travel | 5mm | 2° | 2° |
| 定位精度\Accuracy | ±0.3 μm | NA | NA |
| 重复定位精度\Bi-Repeatability | ±0.1 μm | ±0.1 arcsec | ±0.1 arcsec |
| 最大速度\Maximum Speed（1） | 20 mm/s | NA | NA |
| 最大加速度\Maximum Acceleration（1） | 1 g | NA | NA |
| 最小步进量\Minimum Incremental step（2） | 20nm | 0.05 arcsec | 0.05arcsec |
| 最大负载\Load Capacity | 10 kg | ||
| 平台重量\Stage Mass | 8 kg | ||
| 平台材质\Material | 铝 | ||
| 平均无故障时间\MTBF | 27,000 Hours | ||
备注：
(1) 空载，需配置相应功率的放大器；
(2) 默认测试点位置为台面上方25 mm。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 台面大小 | 反馈 |
| ZTT-V2 | -200 | -AS |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
备注：
（1）单位：mm；
（2）线缆接头未显示。
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