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Custom Motion Systems

Air‑bearing direct‑drive linear stages

Mechanical direct‑drive linear stages

Leadscrew‑driven linear stages

XY two‑axis linear stages

Z‑axis linear stages

LAB165S Series

High‑Rigidity Air‑Bearing Direct‑Drive Linear Stage

LAB210 Series

Long‑Stroke Air‑Bearing Direct‑Drive Linear Stage

ACT85LM Series

Narrow‑Profile Multi‑Stroke Linear Motor Mechanical Stage

ACT120LM Series

High‑Speed Multi‑Stroke Direct‑Drive Mechanical Stage

ART95 Series

High‑Precision Mechanical Direct‑Drive Linear Stage

ART130 Series

High‑Precision Mechanical Direct‑Drive Linear Stage

ART165 Series

High‑Precision Mechanical Direct‑Drive Linear Stage

ART180 Series

High‑Precision Mechanical Direct‑Drive Linear Stage

SMH115LM Series

Linear Motor Driven, Flexible Configuration Options

SMH165LM Series

Linear Motor Driven, Flexible Configuration Options

SMH190LM Series

Linear Motor Driven, Flexible Configuration Options

SMH225LM Series

Linear Motor Driven, Combining High Speed and High Load Capacity

SMH280LM Series

Linear Motor Driven, Combining High Speed and High Load Capacity

SMH560LM Series

Linear Motor Driven, High Speed & High Load Capacity

ART95XY Series

XY Integrated Motion Platform – Easy Multi‑Axis Configuration

ART130XY Series

Nanometer‑Precision XY Integrated Motion Platform

CFT-XY Series

High‑Precision XY Integrated Motion Platform

CFTCA Series

Large Clear‑Aperture XY Integrated Motion Platform

FLAT-XY Series

Ultra‑Low Profile XY Integrated Motion Platform

ONEXY Series

High‑Load, High‑Stiffness XY Integrated Motion Platform

PM Series

High‑Speed XY Integrated Motion Platform

ART95XYZ Series

3‑Axis XYZ Direct‑Drive Mechanical Stage

ART95LZ Series

Single‑Cylinder Z‑Axis Direct‑Drive Stage

ART95SZ Series

Dual‑Cylinder Z‑Axis Direct‑Drive Stage

ART130LZ Series

Single‑Cylinder Z‑Axis Direct‑Drive Stage

ART130SZ Series

Dual‑Cylinder Z‑Axis Direct‑Drive Stage

CRS115SD Series

High‑Precision Leadscrew‑Driven Linear Stage

SMH165SD Series

Heavy‑Load, Long‑Stroke Leadscrew‑Driven Linear Stage

SMH190SD Series

Heavy‑Load, Long‑Stroke Leadscrew‑Driven Linear Stage

SMH225SD Series

Heavy‑Load, Long‑Stroke Leadscrew‑Driven Linear Stage

UCS100SD Series

High‑Flexibility Leadscrew‑Driven Linear Stage

VXC75 Series

High‑Flexibility Leadscrew‑Driven Linear Stage

VXC115 Series

High‑Flexibility Leadscrew‑Driven Linear Stage

ART95XY Series

XY Integrated Motion Platform – Easy Multi‑Axis Configuration

ART130XY Series

Nanometer‑Precision XY Integrated Motion Platform

CFT-XY Series

High‑Precision XY Integrated Motion Platform

CFTCA Series

Large Clear‑Aperture XY Integrated Motion Platform

FLAT-XY Series

Ultra‑Low Profile XY Integrated Motion Platform

ONEXY Series

High‑Load, High‑Stiffness XY Integrated Motion Platform

PM Series

High‑Speed XY Integrated Motion Platform

ART95XYZ Series

3‑Axis XYZ Direct‑Drive Mechanical Stage

ART95LZ Series

Single‑Cylinder Z‑Axis Direct‑Drive Stage

ART95SZ Series

Dual‑Cylinder Z‑Axis Direct‑Drive Stage

ART130LZ Series

Single‑Cylinder Z‑Axis Direct‑Drive Stage

ART130SZ Series

Dual‑Cylinder Z‑Axis Direct‑Drive Stage

Product Center

Air‑bearing direct‑drive rotary stages

Mechanical direct‑drive rotary stages

Multi‑axis rotary stages

ALP Series

Air‑Bearing Rotary Stage with Optional 4‑Channel Pneumatic Rotary Union

ASML Series

Low‑Profile Flat Air‑Bearing Rotary Stage

ASP Series

High‑Speed Air‑Bearing Rotary Stage, Max Speed 5000 rpm

RAB Series

Air‑Bearing Rotary Stage, Max Speed 2000 rpm

ART130-20G Series

High‑Precision Direct‑Drive Tip‑Tilt Stage

HRMS Series

High‑Load Mechanical Direct‑Drive Rotary Stage, Large‑Diameter Dual‑Bearing Design

LART Series

High‑Load Mechanical Direct‑Drive Rotary Stage, High Instantaneous Load Stiffness

LPAR Series

Heavy‑Load, Large‑Clear‑Aperture Mechanical Direct‑Drive Rotary Stage

RSML Series

High‑Speed Mechanical Direct‑Drive Rotary Stage, Low Profile

RSMT Series

Heavy‑Load High‑Precision Mechanical Direct‑Drive Rotary Stage

Surface-Theta Series

High‑Precision Direct‑Drive Rotary Stage, Rich Configuration Options

AB100/150 Series

Tilt/Yaw Dual‑Axis Direct‑Drive Rotary Stage

G100/200 Series

Multi‑Axis Gimbal Stage, Tip/Tilt/Yaw 3‑Axis or Tilt/Yaw 2‑Axis Optional

Product Center

ART130V-5 Series

High‑Precision Direct‑Drive Vertical Lift Stage

ART165V-5 Series

High‑Precision Direct‑Drive Vertical Lift Stage

SMH-V Series

Long‑Stroke Direct‑Drive Vertical Lift Stage

SurfaceZ Series

Low‑Profile Direct‑Drive Vertical Lift Stage

VC60-5 Series

High‑Precision Direct‑Drive Vertical Lift Stage

Product Center

Air‑bearing gantry systems

Mechanical gantry systems

Surface Series

High‑Precision Air‑Bearing Gantry, H‑Type Structure

SLM1500 Series

Dual‑Drive Mechanical Gantry

Product Center

Linear motors

DXSC Series

Ironless Linear Motor – Ultra-Compact Structure

DXUC Series

Ironless Linear Motor – Lightweight Design

DXC Series

Ironless Linear Motor – For High‑Dynamic Cyclic Motion

DX Series

Ironless Linear Motor – Precisely Balances Thrust and Efficiency

DXH Series

Ironless Linear Motor – For Long‑Stroke, High‑Load Applications

Product Center

Semiconductor & IC

Optics & Optical Communications

Medical & Life Sciences

Laser Processing

CUBE-4 Series

XYZT Integrated Direct‑Drive Stage, Ideal for Biological/Wafer Inspection Scanning

ZR100 Series

Z/Theta Integrated Precision Stage – For Wafer & Bio‑Detection

ZTT-V2 Series

3‑Axis Integrated Leveling Stage for Wafer Inspection, Optical Table Adjustment, High‑Magnification Microscope Stages

FAP Series

6‑Axis Fiber‑Optic Alignment Stage

MINI-X1-Y1-Z1 Series

6‑Axis Fiber Alignment Stage

CUBE-4 Series

XYZT Integrated Direct‑Drive Stage, Ideal for Biological/Wafer Inspection Scanning

MicroL-Z Series

XYZ Integrated Stage, Ideal for Biological Tissue Observation and Film Thickness Measurement

SC1 Series

Integrated Linear‑Rotary Stage for Waveguide Processing and Cardiovascular Stent Cutting

SC2 Series

Linear-Rotary Integrated Stage for Waveguide Processing & Cardiovascular Stent Cutting

SC5 Series

Linear-Rotary Integrated Stage for Waveguide Processing & Cardiovascular Stent Cutting

YZX130 Series

High-Precision Side-Mounted Direct-Drive Rotary Stage

ZR100 Series

Z/Theta Integrated Precision Stage – For Wafer & Bio‑Detection

SC1 Series

Integrated Linear‑Rotary Stage for Waveguide Processing and Cardiovascular Stent Cutting

SC2 Series

Linear-Rotary Integrated Stage for Waveguide Processing & Cardiovascular Stent Cutting

SC5 Series

Linear-Rotary Integrated Stage for Waveguide Processing & Cardiovascular Stent Cutting

YZX130 Series

High-Precision Side-Mounted Direct-Drive Rotary Stage

Product Center

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Linear Stages

Rotary Stages

Lift Stages

Gantry Systems

Motors

Industry Motion Systems

Industry Motion Systems

Custom Motion Systems

Custom Motion Systems

MINI-X1-Y1-Z1<br />
6‑Axis Optical Coupling Motion Stage

New Products

MINI-X1-Y1-Z1
6‑Axis Optical Coupling Motion Stage

±100 nm Axis Positioning Accuracy

1 mm MINI Axis Travel