RSML Series
The RSML series is a high‑precision 360° continuous rotary stage powered by a direct‑drive motor with precision ball bearings, delivering excellent dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 100 Hz. Featuring outstanding industrial design with a refined and compact form, it offers table diameters of 75 mm, 100 mm, 150 mm, and 200 mm, with a thickness of less than 60 mm. Equipped with high‑precision circular grating feedback, it achieves positioning accuracy better than 6 arcsec, with axial and radial runout below 6 μm—demonstrating outstanding mechanical performance.
Despite its compact construction, the RSML provides robust driving capability, reaching an unloaded maximum speed exceeding 1800 rpm. With linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 1 arcsec. The RSML series features a hollow design with clear aperture options of 6 mm, 15 mm, and 26 mm. Typical applications include metrology inspection, biological sample processing and observation, and film thickness measurement—wherever arcsec‑level positioning is required.
Product Features
360° continuous direct‑drive rotary stage
Brushless, slotless servo motor with excellent speed stability
High‑precision circular grating feedback; speed exceeding 1800 rpm
Low‑profile design minimizes working height
Arcsec‑level positioning accuracy
Table diameters: 75 mm, 100 mm, 150 mm, and 200 mm optional
Specifications
| 平台型号\Model | RSML-075 | RSML-100 | RSML-150 | RSML-200 | |
| 载物台直径\ Stage Diameter | 75 mm | 95 mm | 145 mm | 190mm | |
| 中空尺寸\Aperture | 0 mm | 6 mm | 15 mm | 26 mm | |
| 转角精度\Accuracy(1) | ±3 arc sec | ±2.5 arc sec | ±2 arc sec | ±2 arc sec | |
| 重复性\ Repeatability (1) | ±1 arc sec | ±1 arc sec | ±1 arc sec | ±1 arc sec | |
| 最小步进量\Minimum Step(1) | 0.05 arc sec | ||||
| 轴跳\Axial Error Motion | 3 μm | 3 μm | 6 μm | 6 μm | |
| 径跳\Radial Error Motion | 3 μm | 3 μm | 6 μm | 6 μm | |
| 持续扭矩\Continuous Torque | 0.16Nm | 0.8 N.m | 3 N.m | 10 N.m | |
| 峰值扭矩\Peak Torque | 0.69Nm | 2.4 N.m | 10 N.m | 30 N.m | |
| 平台重量\Stage Mass | 1 kg | 2.2 kg | 4.7 kg | 8.3 kg | |
| 最大负载\Max Load | 轴向\Axial | 2 kg | 7 kg | 20 kg | 40 kg |
| 径向\Radial | 1 kg | 3 kg | 10 kg | 20 kg | |
| 最高转速\ Maximum Speed(2) | 1800rpm | 1800rpm | 1200rpm | 1200rpm | |
| 平台材质\Material | 铝 | ||||
| 平均无故障时间\MTBF | 27,000 Hours | ||||
备注:
(1)适配-AS圆光栅反馈;
(2)空载指标,最高速度取决于反馈分辨率、实际负载、驱动器。
(3)默认测试点位置为台面上方25 mm,单轴指标,多轴系统的性能指标与实际载荷和工作点位置有关。
Model Selection and Configuration
| 产品系列 | 台面直径(mm) | 反馈 |
| RSML | 75 | -AS |
| 100 | -TTL50 | |
| 150 | ||
| 200 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -TTL50 | TTL 50倍细分 |
Product Dimensions
RSML-075

RSML-100



RSML-150



RSML-200



备注:
(1)单位:mm。
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