.png)
.png)
ART130XY Series
XY Linear Motor Mechanical Stage
The ART130XY series is a nanometer‑precision XY integrated motion platform driven by linear motors with crossed‑roller guides, delivering exceptional dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 100 Hz. The integrated XY design offers a low profile and minimized Abbe errors. XY strokes can be customized to meet customer requirements. It can be used as a standalone 2‑axis stage or combined with the ART130LZ, ART130‑5V vertical lift stages, or RSML rotary stage to form various multi‑axis configurations for diverse applications.
Despite its compact footprint, the ART130XY provides powerful driving capability, reaching a maximum speed of 500 mm/s and unloaded acceleration of 1 g. When equipped with a linear amplifier in a vibration‑isolated laboratory environment, it achieves in‑position stability of 3 nm and a minimum step size below 5 nm. Typical applications include fiber‑optic coupling in telecommunications, wafer defect inspection in semiconductors, gene sequencing in biotechnology, and laser micro/nano machining—with flexible customization available per customer needs.
Get a Quote
产品性能
硬核实力铸就卓越表现
Nanometer‑grade positioning accuracy
High dynamic performance
（截止频率大于100Hz）
Crossed‑roller bearings
Flexible configuration options
(customizable unequal XY travel ranges)
Compact, integrated XY design
Resolution: 1 nm; repeatability: ±100 nm; accuracy: ±250 nm
In‑position stability: 3 nm
(with linear amplifier and vibration‑isolated lab environment)
参数规格
Gain a comprehensive understanding of product information
| 有效行程\Travel | 60mm*60mm | 110mm*110mm | 160mm*160mm |
| 绝对定位精度Accuracy | ±250 nm | ±300nm | ±300nm |
| 双向重复定位精度\Bi-Repeatability | ±100nm | ±100nm | ±100nm |
| 单向重复定位精度\Uni-Repeatability | ±45 nm | ±45 nm | ±45 nm |
| 俯仰\Pitch | 10 arc sec | 12 arc sec | 18 arc sec |
| 偏摆\Yaw | 10 arc sec | 12 arc sec | 18 arc sec |
| 正交性\Orthogonality(1) | 10arc sec | 10 arc sec | 10 arc sec |
| 直线度\Straightness | ±1.5 μm | ±2μm | ±2.5 μm |
| 平面度\Flatness | ±1.5 μm | ±2μm | ±2.5 μm |
| 移动部分重量Moving Mass(上轴\Upper) | 1.7kg | 2.3 kg | 2.6kg |
| 移动部分重量Moving Mass(下轴\Lower) | 4.4 kg | 5.9 kg | 7.1 kg |
| 平台重量\Stage Mass | 6.1 kg | 7.9 kg | 9.4 kg |
| 最大负载\Load Capacity | 12.0 kg | 12.0 kg | 12.0 kg |
| 分辨率\Resolution | 1nm | 1nm | 1 nm |
| 最小步进量\Minimum Incremental Step(2) | 5nm | 5nm | 5nm |
| 在位稳定性\n Position Stability(2) | 3nm | 3nm | 3nm |
| 最大速度\Maximum Speed(3) | 500mm/s | 500 mm/s | 500 mm/s |
| 最大加速度\Maximum Acceleration (3) | 1g | 1g | 1g |
| 持续推力\Continuous Force | 24.4 N | 24.4 N | 24.4 N |
| 峰值推力\Peak Force | 170.4 N | 170.4 N | 170.4 N |
| 平台材质\Material | 铝 | 铝 | 铝 |
| 平均无故障时间\MTBF | 27,000 Hours | 27,000 Hours | 27,000 Hours |
平台型号\model | ART130XY-110-060 | ART130XY-160-060 | ART130XY-160-110 | ART130XY-200-070 |
| 有效行程\Travel | 110mm*60mm | 160mm*60mm | 160mm*110mm | 200mm*70mm |
| 绝对定位精度Accuracy(上轴\Upper) | ±250 nm | ±250 nm | ±300 nm | ±250 nm |
| 绝对定位精度Accuracy(下轴\Lower) | ±300 nm | ±300 nm | ±300 nm | ±300 nm |
| 双向重复定位精度\Bi-Repeatability | ±100nm | ±100 nm | ±100 nm | ±100nm |
| 单向重复定位精度\Uni-Repeatability | ±45 nm | ±45 nm | ±45 nm | ±45 nm |
| 俯仰\Pitch | 10 arc sec | 12 arc sec | 14 arc sec | 18 arc sec |
| 橫滚\Roll | 10arc sec | 12 arc sec | 14 arc sec | 18 arc sec |
| 偏摆\Yaw | 10 arc sec | 12 arc sec | 14 arc sec | 18 arc sec |
| 正交性\Orthogonality (1) | 10 arc sec | 10 arc sec | 10 arc sec | 10 arc sec |
| 直线度\Straightness | ±1.5 μm | ±2 μm | ±2.5 μm | ±2.5 μm |
| 平面度\Flatness | ±1.5 μm | ±2 μm | ±2.5 μm | ±2.5 μm |
| 移动部分重量Moving Mass(上轴\Upper) | 1.7kg | 1.7kg | 2.3kg | 1.8kg |
| 移动部分重量Moving Mass(下轴\Lower) | 4.4kg | 4.4kg | 5.9kg | 4.5 kg |
| 平台重量\Stage Mass | 7.1 kg | 7.8kg | 8.7kg | 9.4kg |
| 最大负载\Load Capacity | 10.0 kg | 10.0 kg | 10.0 kg | 10.0kg |
| 分辨率\Resolution | 1 nm | 1nm | 1nm | 1 nm |
| 最小步进量\Minimum Incremental Step (2) | 10 nm | 10 nm | 10 nm | 10 nm |
| 在位稳定性\n Position Stability(2) | +10 nm | +10 nm | +10 nm | +10nm |
| 最大速度\Maximum Speed(3) | 350mm/s | 350 mm/s | 350 mm/s | 350mm/s |
| 最大加速度\Maximum Acceleration3) | 1g | 1g | 1g | 1g |
| 持续推力\Continuous Force | 24.4 N | 24.4 N | 24.4 N | 24.4 N |
| 峰值推力\PeakForce | 170.4 N | 170.4 N | 170.4 N | 170.4 N |
| 平台材质\Material | 铝 | 铝 | 铝 | 铝 |
| 平均无故障时间\MTBF | 27,000 Hours | 27,000 Hours | 27,000 Hours | 27,000 Hours |
备注：
（1）经过定制2D校准后，正交性可达到 5 arc sec；
（2）适配-ASH反馈，线性放大器；
（3）空载，需配置相应功率的放大器；
（4）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
（5）其他行程可定制。
选型配置
科学搭配，精准匹配所需
| 产品系列 | ART130XY | ||
| 行程（mm） | -060-060、-110-110、-160-160、-110-060、-160-060、-160-110、-200-070 | ||
| 行程选项 | -060-060:60mmX60mm行程 | 110mmX110mm行程 | -160-160:160mmX160mm行程 |
| -110-060:110mmX60mm行程 | 160mmX60mm行程 | -160-110:160mmX110mm行程 | |
| -200-070:200mmX70mm行程 | |||
| 反馈 | -AS、-ASH、-TTL005、-TTL010、-TTL020 | ||
| 反馈选项 | -AS：VPP1伏正弦模拟量输入 | -ASH：高精度VPP1伏正弦模拟量输入 | -TTL005：5nm分辨率数字量TTL信号输入 |
| -TTL010：10nm分辨率数字量TTL信号输入 | -TTL020：20nm 分辨率数字量TTL信号输入 | ||
产品尺寸
精细丈量，尺寸清晰一目了然
| 型号/BASIC MODEL | 标称行程/NOMINAL TRAVEL | A1 | A2 | 行程(Mm) |
| ART130-060-060-XY | 60,60 | 180 | 180 | 150 |
| ART130-110-110-XY | 110,110 | 230 | 230 | 100,200 |
| ART130-160-160-XY | 160,160 | 280 | 280 | 150,250 |
| ART130-110-060-XY | 110,60 | 230 | 180 | 150 |
| ART130-160-060-XY | 160,60 | 280 | 180 | 100,200 |
| ART130-160-110-XY | 160,110 | 280 | 230 | 150,250 |
| ART130-200-070-XY | 200,70 | 320 | 190 | 150,250 |
| ||||
备注：
（1）单位:mm;
（2）线缆接头未显示;
（3）非对称XY行程图纸未显示。
（4）完整3D图纸可官网下载。
相关产品
全系联动，拓展更多选择
Need help with product selection or a quote?
Contact us to build your customized precision motion solution.
Leave a message now.
Submit Form