CRS115SD Series
The CRS115SD series is a high‑precision mechanical motion stage driven by an AC brushless servo motor with a ball screw, featuring crossed‑roller guides. It delivers superior minimum step resolution compared to conventional screw‑driven stages—achieving 50 nm minimum step size, and down to 25 nm with linear amplifiers, with repeatability better than ±0.2 μm. It offers near‑direct‑drive accuracy with greater flexibility: it can serve as a horizontal linear axis or, with an optional brake, be mounted vertically as a Z‑axis alongside other stages. Feedback options include rotary encoders (resolution < 0.2 μm) and linear scales (resolution down to 1 nm).
The CRS115SD is a high‑precision ball screw stage distinguished by superior repeatability and finer step resolution over standard screw‑driven platforms. It is widely used in laser processing (e.g., OLED cutting, PCB drilling) for laser or galvanometer focusing, surface metrology vertical scanning, CNC machining, biotechnology, and IC packaging—providing a sub‑micron positioning solution for diverse applications.
Product Features
Servo motor with ball screw drive
Crossed‑roller guides for finer minimum step resolution
Rugged mechanical construction
(flexible XY/XYZ configuration)
Stroke range: 50 mm to 150 mm
Linear scale and rotary encoder feedback options available
Optional brake with power‑off self‑locking
Specifications
| 平台型号\Model | CRS115SD-050 | CRS115SD-100 | CRS115SD-150 | |
| 有效行程\Travel | 50 mm | 100 mm | 150 mm | |
| 绝对定位精度\Accuracy | 光栅尺 | ±0.5 μm | ±0.6 μm | ±0.6 μm |
| 旋转编码器 | ±0.75 μm | ±1.0 μm | ±1.0 μm | |
| 双向重复定位精度\Bi-Repeatability | 光栅尺 | ±0.15 μm | ±0.2 μm | ±0.2 μm |
| 旋转编码器 | ±0.5 μm | ±0.5 μm | ±0.5 μm | |
| 俯仰\Pitch | 12 arc sec | 14 arc sec | 16 arc sec | |
| 偏摆\Yaw | 8 arc sec | 10 arc sec | 12 arc sec | |
| 直线度\Straightness | ±1.25 µm | ±1.5 µm | ±1.75 µm | |
| 平面度\Flatness | ±1.25 µm | ±1.5 µm | ±1.75 µm | |
| 平台重量\Stage Mass(No Motor) | 3.2 kg | 3.8 kg | 4.5 kg | |
| 最大负载\Load Capacity (1) | 水平 | 20 kg | ||
| 竖直 | 7 kg | |||
| 分辨率\Resolution | 光栅尺 | 1nm,10nm,100nm (2) | ||
| 旋转编码器 | 0.2 μm (3) | |||
| 最大速度\Maximum Speed(4) | 220 mm/s | |||
| 平台材质\Material | 铝 | |||
| 平均无故障时间\MTBF | 27,000 Hours | |||
备注:
(1)有效载荷指标适用于单轴系统,并受限于2500公里行程的丝杠和滚珠寿命。
(2)适配-AS,TTL010, TTL100反馈;
(3)适配RTTL5000反馈选项;
(4)使用占空比过高可能会影响精度;
(5)默认测试点位置为台面上方25 mm,单轴指标,多轴系统的性能指标与实际载荷和工作点位置有关;
(6)多轴配置或定制应用指标咨询厂商。
Model Selection and Configuration
| 产品系列 | 行程(mm) | 载物台 | 反馈 | 电缆管理 |
| CRS115SD | -50 | -TTM | -AS | -CMS0 |
| -100 | -TTR | -ASH | -CMS1 | |
| -150 | -TTKxx | -RTTL5000 | -CMS2 | |
| -RTTL2500 |
行程选项
| -50 | 50 mm |
| -100 | 100 mm |
| -150 | 150 mm |
载物台选项
| -TTM | 载物台公制安装孔 |
| -TTR | 载物台安装孔位,为指定转台设计 |
| -TTKxx | 为客户定制载物台 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -ASH | 高精度1Vpp模拟量反馈 |
| -RTTL5000 | 2500线旋转编码器 |
| -RTTL2500 | 2500线旋转编码器 |
电缆管理选项
| -CMS0 | 无电缆管理,仅留出电机反馈接头 |
| -CMS1 | 单侧托线板、单拖链 |
| -CMS2 | 双侧托线板、双拖链 |
Product Dimensions
CRS115SD-050

CRS115SD-100

CRS115SD-150

备注:
(1)单位:mm;
(2)线缆接头未显示。
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