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CRS115SD Series

High‑Precision Leadscrew‑Driven Linear Stage

The CRS115SD series is a high‑precision mechanical motion stage driven by an AC brushless servo motor with a ball screw, featuring crossed‑roller guides. It delivers superior minimum step resolution compared to conventional screw‑driven stages—achieving 50 nm minimum step size, and down to 25 nm with linear amplifiers, with repeatability better than ±0.2 μm. It offers near‑direct‑drive accuracy with greater flexibility: it can serve as a horizontal linear axis or, with an optional brake, be mounted vertically as a Z‑axis alongside other stages. Feedback options include rotary encoders (resolution < 0.2 μm) and linear scales (resolution down to 1 nm).

The CRS115SD is a high‑precision ball screw stage distinguished by superior repeatability and finer step resolution over standard screw‑driven platforms. It is widely used in laser processing (e.g., OLED cutting, PCB drilling) for laser or galvanometer focusing, surface metrology vertical scanning, CNC machining, biotechnology, and IC packaging—providing a sub‑micron positioning solution for diverse applications.


Features Specifications Configuration Dimensions

Product Features

Hard-Core Capabilities Drive Exceptional Performance
Servo motor with ball screw drive Servo motor with ball screw drive

Servo motor with ball screw drive

Crossed‑roller guides for finer minimum step resolution Crossed‑roller guides for finer minimum step resolution

Crossed‑roller guides for finer minimum step resolution

Rugged mechanical construction Rugged mechanical construction

Rugged mechanical construction
(flexible XY/XYZ configuration)

Stroke range: 50 mm to 150 mm Stroke range: 50 mm to 150 mm

Stroke range: 50 mm to 150 mm

Linear scale and rotary encoder feedback options available Linear scale and rotary encoder feedback options available

Linear scale and rotary encoder feedback options available

Optional brake with power‑off self‑locking Optional brake with power‑off self‑locking

Optional brake with power‑off self‑locking

Specifications

Gain a comprehensive understanding of product information
平台型号\ModelCRS115SD-050CRS115SD-100CRS115SD-150
有效行程\Travel50 mm100 mm150 mm
绝对定位精度\Accuracy光栅尺±0.5 μm±0.6 μm±0.6 μm
旋转编码器±0.75 μm±1.0 μm±1.0 μm
双向重复定位精度\Bi-Repeatability光栅尺±0.15 μm±0.2 μm±0.2 μm
旋转编码器±0.5 μm±0.5 μm±0.5 μm
俯仰\Pitch12 arc sec14 arc sec16 arc sec
偏摆\Yaw8 arc sec10 arc sec12 arc sec
直线度\Straightness±1.25 µm±1.5 µm±1.75 µm
平面度\Flatness±1.25 µm±1.5 µm±1.75 µm
平台重量\Stage Mass(No Motor)3.2 kg3.8 kg4.5 kg
最大负载\Load Capacity (1)水平20 kg
竖直7 kg
分辨率\Resolution光栅尺1nm,10nm,100nm (2)
旋转编码器0.2 μm (3)
最大速度\Maximum Speed(4)220 mm/s
平台材质\Material
平均无故障时间\MTBF27,000 Hours

备注:

(1)有效载荷指标适用于单轴系统,并受限于2500公里行程的丝杠和滚珠寿命。

(2)适配-AS,TTL010, TTL100反馈;

(3)适配RTTL5000反馈选项;

(4)使用占空比过高可能会影响精度;

(5)默认测试点位置为台面上方25 mm,单轴指标,多轴系统的性能指标与实际载荷和工作点位置有关;

(6)多轴配置或定制应用指标咨询厂商。


Model Selection and Configuration

Scientifically Formulated, Precisely Tailored to Your Needs
产品系列行程(mm)载物台反馈电缆管理
CRS115SD-50-TTM-AS-CMS0
-100-TTR-ASH-CMS1
-150-TTKxx-RTTL5000-CMS2


-RTTL2500


行程选项


-5050 mm
-100100 mm
-150150 mm


载物台选项


-TTM载物台公制安装孔
-TTR载物台安装孔位,为指定转台设计
-TTKxx为客户定制载物台


反馈选项


-ASVPP 1伏正弦模拟量输入
-ASH高精度1Vpp模拟量反馈
-RTTL50002500线旋转编码器
-RTTL25002500线旋转编码器


电缆管理选项


-CMS0无电缆管理,仅留出电机反馈接头
-CMS1单侧托线板、单拖链
-CMS2双侧托线板、双拖链


Product Dimensions

Precise measurements—dimensions are clear at a glance



  CRS115SD-050


  CRS115SD-100

  CRS115SD-150

  备注:

  (1)单位:mm;

  (2)线缆接头未显示。




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