The ART95XYZ series is a nanometer‑precision XYZ integrated motion platform driven by linear motors with crossed‑roller guides, delivering exceptional dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 100 Hz. The integrated XYZ design offers high precision, compact dimensions, and a high degree of integration. XYZ strokes can be customized to meet customer requirements. It can be used as a standalone 3‑axis stage or combined with the RSML rotary stage to form various multi‑axis configurations for diverse applications.

Despite its compact construction, the ART95XYZ provides robust driving capability, reaching a maximum speed of 200 mm/s and unloaded acceleration of 1 g. When equipped with linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability of 3 nm and a minimum step size below 5 nm. Typical applications include fiber‑optic coupling in telecommunications, wafer defect inspection in semiconductors, gene sequencing in biotechnology, and optical alignment—with flexible customization available per customer needs.

Its sophisticated mechanical design ensures outstanding precision and dynamic performance, especially in applications demanding stringent speed stability.