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LAB165S系列
High‑Rigidity Air‑Bearing Direct‑Drive Linear Stage
The LAB165S is an air‑bearing stage with nanometer‑level positioning accuracy, driven by a linear motor. It employs air bearings as support guides, leveraging the elastic potential of air to deliver outstanding dynamic performance and positioning accuracy, with an unloaded cutoff frequency of up to 120 Hz. The stage uses magnetic preload technology: the air bearings support the slider while a magnetic field generates counterforce to maintain the proper air gap. Thanks to its dedicated design, the LAB165S achieves exceptional geometric performance, with straightness and flatness better than ±0.6 μm over 200 mm travel, and pitch/yaw/roll within ±2.5 arc sec. It is ideal for applications requiring high cleanliness (e.g., semiconductor) or demanding straightness and flatness.
The LAB165S offers strong drive capability, with a maximum unloaded speed of 1000 mm/s and acceleration up to 0.5 g. It is primarily used in optical lens inspection, wafer defect detection in semiconductor manufacturing, precision fabrication, and packaging. Customized solutions are available based on customer requirements.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
High dynamic performance (cutoff frequency >120 Hz)
Magnetic preload air bearings, zero‑friction air‑bearing stage
Tailored for high‑performance scanning and inspection applications
Resolution 1 nm, repeatability ±0.1 μm, positioning accuracy ±0.2 μm
Travel up to 200 mm, with cable management options
Optional high‑precision zero‑thermal‑expansion grating feedback
Non‑contact, zero‑friction direct‑drive air‑bearing stage
Air‑gap averaging effect; straightness and flatness up to ±0.3 μm/100 mm
Specifications
Gain a comprehensive understanding of product information
| 平台型号\Model | LAB165S-025 | LAB165S-050 | LAB165S-100 |
| 有效行程\Travel | 25 mm | 50 mm | 100 mm |
| 绝对定位精度\Accuracy | ±0.15 μm | ±0.2 μm | ±0.2 μm |
| 双向重复定位精度\Bi-Repeatability | ±0.075 μm | ±0.1 μm | ±0.1 μm |
| 俯仰\Pitch | ±0.75 arc sec | ±1 arc sec | ±1.5 arc sec |
| 偏摆\Yaw | ±0.75 arc sec | ±1 arc sec | ±1.5 arc sec |
| 直线度\Straightness | ±0.3 µm | ±0.3 µm | ±0.5 µm |
| 平面度\Flatness | ±0.3 µm | ±0.3 µm | ±0.5 µm |
| 平台重量\Stage Mass | 5.9 kg | 6.3 kg | 7 kg |
| 最大水平负载\Load Horizontal Capacity | 10 kg | ||
| 分辨率\Resolution （1） | 1 nm | ||
| 最小步进量\Minimum Incremental step （1） | 10 nm | ||
| 在位稳定性\In Position Stability （1） | ±10 nm | ||
| 最大速度\Maximum Speed （2） | 1000 mm/s | ||
| 最大加速度\Maximum Acceleration（2） | 0.5 g | ||
| 持续推力\Continuous Force | 12 N | ||
| 峰值推力\Peak Force | 85 N | ||
| 工作气压\Operating Pressure （5） | 5.5 bar (建议干燥空气，滤水滤油，粉尘过滤到0.5μm以下) | ||
| 平台材质\Material | 铝 | ||
| 平均无故障时间\MTBF | 27,000 Hours | ||
平台型号\Model | LAB165S-150 | LAB165S-200 |
| 有效行程\Travel | 150 mm | 200 mm |
| 绝对定位精度\Accuracy | ±0.2 μm | ±0.3 μm |
| 双向重复定位精度\Bi-Repeatability | ±0.1 μm | ±0. 1 μm |
| 俯仰\Pitch | ±2 arc sec | ±2.5 arc sec |
| 偏摆\Yaw | ±2 arc sec | ±2.5 arc sec |
| 直线度\Straightness | ±0.5 µm | ±0.6 µm |
| 平面度\Flatness | ±0.5 µm | ±0.6 µm |
| 平台重量\Stage Mass | 7.7 kg | 10.5 kg |
| 最大水平负载\Load Horizontal Capacity | 10 kg | |
| 分辨率\Resolution （1） | 1 nm | |
| 最小步进量\Minimum Incremental step （1） | 10 nm | |
| 在位稳定性\In Position Stability （1） | ±10 nm | |
| 最大速度\Maximum Speed （2） | 1000 mm/s | |
| 最大加速度\Maximum Acceleration（2） | 0.5 g | |
| 持续推力\Continuous Force | 12 N | |
| 峰值推力\Peak Force | 85 N | |
| 工作气压\Operating Pressure （5） | 5.5 bar (建议干燥空气，滤水滤油，粉尘过滤到0.5μm以下) | |
| 平台材质\Material | 铝 | |
| 平均无故障时间\MTBF | 27,000 Hours | |
备注：
（1）适配-ASH反馈，配置线性放大器；
（2）空载，需配置相应功率的放大器；
（3）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
（4）气缸供气需配置空滤三联件，必须清洁、干燥，过滤至0.25μm以下颗粒，建议使用纯度为99.9%的氮气。气压根据平台实际负载重量可调。
（5）为了防止空气轴承气压不足，建议安装气压开关，信号输入到运动控制器连接急停（E-STOP）端口。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 行程（mm） | 反馈 | 电缆管理 |
| LAB165S | -25 | -AS | -CMS1 |
| -50 | -TTL100 | -CMS2 | |
| -100 | -TTL010 | ||
| -150 | -TTL005 | ||
| -200 | -ASH |
行程选项
| -25 | 25 mm 行程 |
| -50 | 50 mm 行程 |
| -100 | 100 mm 行程 |
| -150 | 150 mm 行程 |
| -200 | 200 mm 行程 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -TTL100 | 0.1μm分辨率数字量TTL信号输入 |
| -TTL010 | 10nm分辨率数字量TTL信号输入 |
| -TTL005 | 5nm分辨率数字量TTL信号输入 |
| -ASH | 高精度VPP 1伏正弦模拟量输入 |
电缆管理选项
| -CMS1 | 单侧托线板、单拖链 |
| -CMS2 | 双侧托线板、双拖链 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
| STAGE MODEL | NORMAL TRAVEL | A | STAGE MASS(KG) |
| LAB165S-025 | 25 | 270 | 5.9 |
| LAB165S-050 | 50 | 295 | 6.3 |
| LAB165S-100 | 100 | 345 | 7 |
| LAB165S-150 | 150 | 395 | 7.7 |
| LAB165S-200 | 200 | 525 | 10.5 |
备注：
（1）单位：mm；
（2）拖链未显示。
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