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PM Series
High‑Speed XY Integrated Motion Platform
The PM series is a sub‑micron precision XY integrated positioning platform with direct‑drive linear motors in a two‑axis integrated design, delivering excellent performance and repeatability—with bidirectional repeatability below ±0.3 μm. Featuring outstanding industrial design, the series offers superior dynamics and geometry, with an unloaded crossover frequency exceeding 120 Hz and full‑stroke flatness and straightness within ±2 μm—making it a high‑precision stage that handles heavy loads with ease.
Both axes are driven by high‑thrust dual motors, achieving an unloaded maximum speed of 2000 mm/s and acceleration of 2 g, while maintaining minimal dynamic following error even at high speed. For example, when completing a full profile trajectory within 1.2 seconds, the dynamic following error is less than 12 μm (captured by scope). The PM series combines high precision, heavy load capacity, and a low profile—ideal for high‑speed laser processing, metrology inspection, surface roughness testing, and other industrial and research applications requiring sub‑micron positioning accuracy.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
XY integrated direct‑drive stage
Dual‑motor drive for superior dynamic performance
Outstanding geometric performance and load capacity
Compact, low profile, minimal Abbe error
XY travel: 350 mm × 250 mm or 360 mm × 360 mm
Repeatability: ±0.3 μm; accuracy: ±1 μm
Multiple feedback options
(zero‑expansion optical scales available)
Specifications
Gain a comprehensive understanding of product information
| 有效行程\Travel | 350mm*250mm | 360mm*360mm | |
| 定位精度\Accuracy | ± 0.75μm | ±0.75μm | |
| 重复定位精度\Bi-Repeatability | ±0.15 μm | ±0.15μm | |
| 俯仰\Pitch | 18 arc sec | ||
| 偏摆\Yaw | 10 arc sec | ||
| 直线度\Straightness | ±2 μm | ||
| 平面度\Flatness | ±2 μm | ||
| 正交性\Orthogonality | 15 arc sec | ||
| 最大速度\Maximum Speed（1） | 2000 mm/s | ||
| 最大加速度\Maximum Acceleration（1） | 2.0 g | ||
| 持续推力\Continuous Force | 上轴 | 224.2 N | |
| 下轴 | 317.2 N | ||
| 峰值推力\Peak Force | 上轴 | 1303 N | |
| 下轴 | 2023.4 N | ||
| 最大负载\Load Capacity | 45 kg | ||
| 平台重量\Stage Mass(No Motor) | 80kg | 100kg | |
| 最小步进量\Minimum Incremental step（2） | 20 nm | ||
| 平台材质\Material | 铝 | ||
| 平均无故障时间\MTBF | 27,000 Hours | ||
备注：
（1）空载，需配置相应功率的放大器；
（2）适配-AS反馈，以及线性放大器；
（3）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
（4）其他行程可定制。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 行程（mm） | 反馈 | 线缆管理 |
| PM | 350-250 | -AS | -CMS0 |
| 360-360 | -ASH | -CMS1 | |
| -TTL005 | |||
| -TTL010 | |||
| -TTL020 | |||
| -TTL100 |
行程选项
| -350-250 | 上轴250mm，下轴350mm行程 |
| -360-360 | 上轴360mm，下轴360mm行程 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -ASH | 高精度VPP 1伏正弦模拟量输入 |
| -TTL005 | 5 nm分辨率数字量TTL信号输入 |
| -TTL010 | 10 nm分辨率数字量TTL信号输入 |
| -TTL020 | 20 nm分辨率数字量TTL信号输入 |
| -TTL100 | 0.1μm分辨率数字量TTL信号输入 |
电缆管理选项
| -CMS0 | 无电缆管理，仅留出电机反馈接口 |
| -CMS1 | 客户拖链预留一根直径4mm气管、两根直径4mm线缆 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
PM350-250
PM360-360
备注：
（1）单位：mm；
（2）CMS线缆管理未显示。
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