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ART130LZ Series
Single‑Cylinder Z‑Axis Direct‑Drive Stage
The ART130LZ series is a nanometer‑precision vertical motion stage, driven by linear motors with crossed‑roller guides, delivering exceptional dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 100 Hz. It serves as an effective complement to the ART130 horizontal stages and can be combined with the ART130 or ART130XY series to form various multi‑axis configurations for diverse applications.
Despite its compact construction, the ART130LZ provides robust driving capability, reaching a maximum speed of 500 mm/s and unloaded acceleration of 1 g. When equipped with linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 10 nm, with flatness/straightness within ±1.5 μm. Typical applications include fiber‑optic coupling in telecommunications, wafer defect inspection in semiconductors, gene sequencing in biotechnology, and laser micro/nano machining—with flexible customization available per customer needs.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
Nanometer‑grade positioning accuracy
With air cylinder counterbalance for superior dynamic performance
(crossover frequency > 100 Hz)
Crossed‑roller guides
Flexible configuration options
(various strokes and feedback options)
Resolution: 1 nm; repeatability: ±100 nm; accuracy: ±200 nm
In‑position stability: 3 nm
(with linear amplifiers and vibration‑isolated lab environment)
Specifications
Gain a comprehensive understanding of product information
| 平台型号\Model | ART130LZ-035 | ART130LZ-060 |
| 有效行程\Travel | 35 mm | 60 mm |
| 绝对定位精度\Accuracy | ±200 nm | ±300 nm |
| 双向重复定位精度\Bi-Repeatability | ±100 nm | ±100 nm |
| 单向重复定位精度\Uni-Repeatability | ±45 nm | ±45 nm |
| 俯仰\Pitch | 10 arc sec | 10 arc sec |
| 偏摆\Yaw | 10 arc sec | 10 arc sec |
| 直线度\Straightness | ±1.5 µm | ±2.0 µm |
| 平面度\Flatness | ±1.5 µm | ±2.0 µm |
| 移动部分重量\Moving Mass | 1.3 kg | 1.5 kg |
| 平台重量\Stage Mass | 4.5 kg | 5.5 kg |
| 最大负载\Load Capacity(竖直\Vertical) | 10 kg | |
| 分辨率\Resolution（1） | 1 nm | |
| 最小步进量\Minimum Incremental step （1） | 5 nm | |
| 在位稳定性\In Position Stability （1） | 3 nm | |
| 最大速度\Maximum Speed （2） | 200 mm/s | |
| 最大加速度\Maximum Acceleration （2） | 1 g | |
| 持续推力\Continuous Force | 24.4 N | |
| 峰值推力\Peak Force | 170.4 N | |
| 平台材质\Material | 铝 | |
| 平均无故障时间\MTBF | 27,000 Hours | |
备注：
(1)适配-ASH反馈，线性放大器；
(2)空载，需配置相应功率的放大器；
(3)默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
(4)气缸供气需配置空滤三联件，必须清洁、干燥，过滤至0.25μm以下颗粒，建议使用纯度为99.9%的氮气。气压根据平台实际负载重量可调。
(5)其他行程可定制。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 行程（mm） | 反馈 |
| ART130LZ | -035 | -AS |
| -060 | -ASH | |
| -TTL005 | ||
| -TTL010 | ||
| -TTL020 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -ASH | 高精度VPP 1伏正弦模拟量输入 |
| -TTL005 | 5 nm分辨率数字量TTL信号输入 |
| -TTL010 | 10 nm分辨率数字量TTL信号输入 |
| -TTL020 | 20 nm分辨率数字量TTL信号输入 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
| 型号 BASIC MODEL | 标称行程 NOMINAL TRAVEL | 光电限位行程 ELEC LIMIT TRAVEL | 机械限位行程 MECH LIMIT TRAVEL |
| ART130LZ-035 | 35 | 41 | 45 |
| ART130LZ-060 | 60 | 66 | 70 |
AR130LZ-035
AR130LZ-060
备注：
（1）单位：mm；
（2）线缆接头未显示。
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