The ART180 series is a motion stage with nanometer‑level positioning accuracy, driven by a linear motor and guided by crossed‑roller bearings. It delivers excellent dynamic performance and positioning accuracy, with an unloaded cutoff frequency exceeding 100 Hz. Travel can be customized to customer requirements. It can be used as a single‑axis stage or combined with the ART130 series linear stage, ART130V‑5 lift stage, or RSML rotary stage to form various multi‑axis configurations for specific applications.

The ART180 series offers strong load capacity and drive capability, with a maximum horizontal load of 30 kg, lateral load of 20 kg, maximum speed of 800 mm/s, and unloaded acceleration up to 2 g. When configured with linear amplifiers in a vibration‑isolated lab environment, the stage achieves in‑position stability of 3 nm and a minimum step size of less than 5 nm. Balancing motion accuracy, long travel, high dynamic performance, and robust load capacity, the ART180 series is a versatile nanopositioning stage for applications such as telecommunications, surface profile inspection, high‑precision pick‑and‑place and assembly, semiconductor wafer defect inspection, and gene sequencing in biomedical research. Customized solutions are available based on application requirements.

The sophisticated mechanical design ensures exceptional accuracy and dynamic performance, particularly in applications demanding stringent velocity stability. For example, in scanning inspection requiring a constant linear speed of 20 mm/s over a travel of 130 mm, the ART180 series maintains a dynamic following error of less than ±100 nm during the constant‑velocity phase, reliably fulfilling the task.