The ART95XY series is a nanometer‑precision XY integrated motion platform driven by linear motors with crossed‑roller guides, delivering exceptional dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 100 Hz. The integrated XY design offers a low profile and minimized Abbe errors. XY strokes can be customized to meet customer requirements. It can be used as a standalone 2‑axis stage or combined with the ART95LZ vertical lift stage or RSML rotary stage to form various multi‑axis configurations for diverse applications.

Despite its compact footprint, the ART95XY provides powerful driving capability, reaching an unloaded maximum speed of 500 mm/s and acceleration of 1 g. When equipped with a linear amplifier in a vibration‑isolated laboratory environment, it achieves in‑position stability of 3 nm and a minimum step size below 5 nm. Typical applications include fiber‑optic coupling in telecommunications, wafer defect inspection in semiconductors, gene sequencing in biotechnology, and optical alignment—with flexible customization available per customer needs.

Its sophisticated mechanical design ensures outstanding precision and dynamic performance, especially in applications demanding stringent speed stability. For example, in scanning inspection where the linear axis must maintain a constant speed of 20 mm/s, the ART95XY achieves a dynamic following error of less than ±100 nm during the constant‑velocity phase, demonstrating excellent speed stability and reliable task execution.