The ONEXY series is a nanometer‑precision XY integrated motion platform, driven by linear motors with an open‑frame design, delivering exceptional performance and positioning accuracy—with an unloaded crossover frequency exceeding 120 Hz. The series features outstanding industrial design with well‑proportioned geometry. For instance, the ONEXY‑250‑250 offers a load capacity of 45 kg and achieves full‑stroke flatness and straightness within ±2 μm—making it a high‑precision stage that handles heavy loads with ease. It can be combined with the Surface‑Z focus lift stage and Surface‑Theta fine‑adjustment rotary stage to form multi‑axis configurations for diverse applications.

Despite its compact construction, the ONEXY provides robust driving capability. The lower axis is driven by dual motors, and both axes reach an unloaded maximum speed of 2000 mm/s and acceleration of 2 g. With three travel options—250 mm × 250 mm, 350 mm × 350 mm, and 500 mm × 500 mm—and an electronic resolution of 1 nm (minimum step < 20 nm), it combines long travel, high precision, heavy load capacity, and a low profile. Typical applications include metrology, wafer inspection, surface roughness testing, and laser cutting—wherever nanometer‑level positioning is required in industrial and research settings.