The Surface‑Theta series is a high‑precision 360° continuous rotary stage powered by a direct‑drive motor, delivering excellent dynamic performance and positioning accuracy. Featuring outstanding industrial design with a low profile, it is ideal for space‑constrained applications. Equipped with high‑precision circular grating feedback, it achieves positioning accuracy of ±2 arcsec and repeatability below ±1 arcsec, with a maximum horizontal load capacity of 30 kg and side‑mount load capacity of 10 kg—demonstrating outstanding mechanical performance.

The Surface‑Theta series features a large‑diameter bearing design that ensures high system stiffness and excellent repeatability—without performance degradation even under heavy loads. With linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 0.05 arcsec.

The Surface‑Theta series offers flexible configuration options, including analog or digital feedback. For semiconductor applications, it is available with rotary unions and air tubing to effectively address cable tangling during 360° continuous rotation. Thanks to its low profile, high precision, excellent repeatability, and strong load capacity, the Surface‑Theta is widely used in semiconductor inspection and packaging applications.