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SMH190LM Series
Cost-Effective Mechanical Direct-Drive Linear Stage
The SMH190LM series is powered by a linear motor, delivering high speed, superior dynamics, and low friction—ideal for precise position control in long‑stroke, high‑velocity, and high‑accuracy applications.
Equipped with high‑resolution optical scales (electronic resolution down to 1 nm), the SMH190LM achieves sub‑micron repeatability and positioning accuracy through calibration. Its low‑friction side seals protect against dust and particles, ensuring long‑term reliability and extended maintenance intervals. Cable management options are available, and the side seal design simplifies routine upkeep.
As a critical component in precision machinery, the SMH190LM is widely used in OLED cutting, PCB drilling, CNC machining, biotechnology, IC packaging, and surface metrology—offering a robust solution that combines precision positioning, high speed, and heavy load capacity.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
Direct‑drive motor for high‑precision positioning
Cost‑effective solution
Rugged mechanical construction
Flexible configurations (various strokes, table sizes, and feedback options)
Stroke range: 100 mm to 800 mm
Max speed: 2000 mm/s; max acceleration: 2 g
Optional single‑sided or dual‑sided cable management
Specifications
Gain a comprehensive understanding of product information
| 平台型号\Model | SMH190LM-100 | SMH190LM-200 | SMH190LM-300 | SMH190LM-400 | |
| 有效行程\Travel | 100 mm | 200 mm | 300 mm | 400 mm | |
| 绝对定位精度\Accuracy | ±1 μm | ±1 μm | ±1 μm | ±1 μm | |
| 双向重复定位精度\Bi-Repeatability | ±0.3 μm | ±0.4 μm | ±0.4 μm | ±0.4 μm | |
| 俯仰\Pitch | 6 arc sec | 8 arc sec | 10 arc sec | 12 arc sec | |
| 偏摆\Yaw | 6 arc sec | 8 arc sec | 10 arc sec | 12 arc sec | |
| 直线度\Straightness | ±1.5 μm | ±2.5 μm | ±3.5 μm | ±4.5 μm | |
| 平面度\Flatness | ±1.5 μm | ±2.5 μm | ±3.5 μm | ±4.5 μm | |
| 平台重量\Stage Mass | 14.4 kg | 16.8 kg | 19.3 kg | 21.7 kg | |
| 最大负载\Load Capacity | 水平安装 | 60 kg | |||
| 侧向安装 | 60 kg | ||||
| 分辨率\Resolution（1） | 1 nm | ||||
| 最小步进\Minimal Incremental Step（1） | 20 nm | ||||
| 在位稳定性\In Position Stability（1） | ±10 nm | ||||
| 最大速度\Maximum Speed（2） | 2 m/s | ||||
| 最大加速度\Maximum Acceleration（2） | 2 g | ||||
| 持续推力\Continuous Force | 112.1 N | ||||
| 峰值推力\Peak Force | 651.5 N | ||||
| 平台材质\Material | 铝 | ||||
| 平均无故障时间\MTBF | 27,000 Hours | ||||
| 平台型号\Model | SMH190LM-500 | SMH190LM-600 | SMH190LM-700 | SMH190LM-800 | |
| 有效行程\Travel | 500 mm | 600 mm | 700 mm | 800 mm | |
| 绝对定位精度\Accuracy | ±1 μm | ±1 μm | ±1.5 μm | ±1.5 μm | |
| 双向重复定位精度\Bi-Repeatability | ±0.4 μm | ±0.4 μm | ±0.5 μm | ±0.5 μm | |
| 俯仰\Pitch | 14 arc sec | 16 arc sec | 18 arc sec | 20 arc sec | |
| 偏摆\Yaw | 14 arc sec | 16 arc sec | 18 arc sec | 20 arc sec | |
| 直线度\Straightness | ±5.5 μm | ±6.5 μm | ±7.3 μm | ±8.0 μm | |
| 平面度\Flatness | ±5.5 μm | ±6.5 μm | ±7.3 μm | ±8.0 μm | |
| 平台重量\Stage Mass | 24.2 kg | 26.6 kg | 29.4 kg | 32.0 kg | |
| 最大负载\Load Capacity | 水平安装 | 60 kg | |||
| 侧向安装 | 60 kg | ||||
| 分辨率\Resolution（1） | 1 nm | ||||
| 最小步进\Minimal Incremental Step（1） | 20 nm | ||||
| 在位稳定性\In Position Stability （1） | ±10 nm | ||||
| 最大速度\Maximum Speed（2） | 2 m/s | ||||
| 最大加速度\Maximum Acceleration（2） | 2 g | ||||
| 持续推力\Continuous Force | 112.1 N | ||||
| 峰值推力\Peak Force | 651.5 N | ||||
| 平台材质\Material | 铝 | ||||
| 平均无故障时间\MTBF | 27,000 Hours | ||||
备注：
（1）适配-AS反馈，以及线性放大器；
（2）空载，需配置相应功率的放大器；
（3）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
（4）其他行程可定制。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 行程（mm） | 载物台 | 反馈 | 电缆管理 |
| SMH190LM | -100 | -TTM | -AS | -CMS0 |
| -200 | -TTR | -TTL010 | -CMS1 | |
| -300 | -TTKxx | -TTL100 | -CMS2 | |
| -400 | ||||
| -500 | ||||
| -600 | ||||
| -700 | ||||
| -800 |
行程选项
| -100 | 100mm行程 |
| -200 | 200mm行程 |
| -300 | 300mm行程 |
| -400 | 400mm行程 |
| -500 | 500mm行程 |
| -600 | 600mm行程 |
| -700 | 700mm行程 |
| -800 | 800mm行程 |
载物台选项
| -TTM | 载物台公制安装孔 |
| -TTR | 载物台安装孔位，为指定转台设计 |
| -TTKxx | 为客户定制载物台 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -TTL010 | 10nm分辨率数字量TTL信号输入 |
| -TTL100 | 0.1μm分辨率数字量TTL信号输入 |
电缆管理选项
| -CMS0 | 无电缆管理，仅留出电机反馈接头 |
| -CMS1 | 单侧托线板、单拖链 |
| -CMS2 | 双侧托线板、双拖链 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
| 型号 BASIC MODEL | 标称行程 NOMINAL TRAVEL | 电子限位行程 ELEC LIMIT TRAVEL | 机械限位行程 MECH LIMIT TRAVEL | A | B |
| SMH190LM-100 | 100 | 105 | 125 | 390 | 175250 |
| SMH190LM-200 | 200 | 205 | 225 | 490 | 175275 |
| SMH190LM-300 | 300 | 305 | 325 | 590 | 175375 |
| SMH190LM-400 | 400 | 405 | 425 | 690 | 175450 |
| SMH190LM-500 | 500 | 505 | 525 | 790 | 175450 |
| SMH190LM-600 | 600 | 605 | 625 | 890 | 175575 |
| SMH190LM-700 | 700 | 705 | 725 | 990 | 175575 |
| SMH190LM-800 | 800 | 805 | 825 | 1090 | 175575775 |
备注：
（1）单位：mm；
（2）双侧拖链配置未显示。
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