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SMH190SD Series
Heavy‑Load, Long‑Stroke Leadscrew‑Driven Linear Stage
The SMH190SD series is a flexible mechanical linear motion stage driven by an AC brushless servo motor with a ball screw, reaching a maximum speed of 300 mm/s. It can be used as a horizontal linear axis or, with an optional power‑off brake, mounted vertically as a Z‑axis stage alongside LM series linear motor platforms. Feedback options include rotary encoders (resolution < 0.5 μm) and linear scales (resolution down to 0.1 μm).
As a key component in precision machinery, the SMH190SD features rugged construction and high load capacity—commonly configured with a brake for Z‑axis focusing applications. It is widely used in laser processing (e.g., OLED cutting, PCB drilling) for laser or galvanometer focusing, surface metrology vertical scanning, as well as CNC machining, biotechnology, and IC packaging.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
Servo motor with ball screw drive
Cost‑effective solution
Rugged mechanical construction with flexible configuration options
Stroke range: 100 mm to 800 mm
Linear scale and rotary encoder feedback options available
Power‑off brake with self‑locking function
Specifications
Gain a comprehensive understanding of product information
| 平台型号\Model | SMH190SD-100 | SMH190SD-150 | SMH190SD-200 | SMH190SD-250 | SMH190SD-300 | |
| 有效行程\Travel | 100 mm | 150 mm | 200 mm | 250 mm | 300 mm | |
| 定位精度\Accuracy | 光栅尺 | ±0.6 μm | ±1 μm | ±1 μm | ±1.2 μm | ±1.2 μm |
| 旋转编码器 | ±1 μm | ±1 μm | ±1.5 μm | ±1.5 μm | ±1.5 μm | |
| 重复定位精度\Bi-Repeatability | 光栅尺 | ±0.25 μm | ±0.4 μm | ±0.4 μm | ±0.4 μm | ±0.5 μm |
| 旋转编码器 | ±1 μm | ±1 μm | ±1 μm | ±1.5 μm | ±1.5 μm | |
| 俯仰\Pitch | 6 arc sec | 7 arc sec | 8 arc sec | 8 arc sec | 9 arc sec | |
| 横滚\Roll | 6 arc sec | 7 arc sec | 8 arc sec | 8 arc sec | 9 arc sec | |
| 偏摆\Yaw | 6 arc sec | 7 arc sec | 8 arc sec | 8 arc sec | 9 arc sec | |
| 直线度\Straightness | ±2 μm | ±2.5 μm | ±3 μm | ±3 μm | ±3.5 μm | |
| 平面度\Flatness | ±2 μm | ±2.5 μm | ±3 μm | ±3 μm | ±3.5 μm | |
| 平台重量\Stage Mass(No Motor) | 11.2 kg | 12 kg | 12.8 kg | 13.7 kg | 14.6 kg | |
| 最大负载\Load Capacity | 水平 | 60 kg | ||||
| 竖直 | 40 kg | |||||
| 分辨率\Resolution | 光栅尺 | 1 nm, 10 nm, 0.1 μm | ||||
| 旋转编码器 | 0.5 μm | |||||
| 最小步进\Minimal Incremental Step | 100 nm（1），1 μm（2） | |||||
| 在位稳定性\In Position Stability | ±30 nm（1），±1 μm（2） | |||||
| 最大速度\Maximum Speed（3） | 300 mm/s | |||||
| 平台材质\Material | 铝 | |||||
| 平均无故障时间\MTBF | 27,000 Hours | |||||
| 平台型号\Model | SMH190SD-400 | SMH190SD-500 | SMH190SD-600 | SMH190SD-700 | SMH190SD-800 | |
| 有效行程\Travel | 400 mm | 500 mm | 600 mm | 700 mm | 800 mm | |
| 定位精度\Accuracy | 光栅尺 | ±1.5 μm | ±1.5 μm | ±1.75 μm | ±1.75 μm | ±1.75 μm |
| 旋转编码器 | ±1.5 μm | ±2 μm | ±2 μm | ±2.5 μm | ±2.5 μm | |
| 重复定位精度\Bi-Repeatability | 光栅尺 | ±0.5 μm | ±0.5 μm | ±0.5 μm | ±0.5 μm | ±0.75 μm |
| 旋转编码器 | ±1.5 μm | ±1.5 μm | ±1.5 μm | ±1.5 μm | ±1.5 μm | |
| 俯仰\Pitch | 10 arc sec | 12 arc sec | 15 arc sec | 16 arc sec | 18 arc sec | |
| 横滚\Roll | 10 arc sec | 12 arc sec | 15 arc sec | 16 arc sec | 18 arc sec | |
| 偏摆\Yaw | 10 arc sec | 12 arc sec | 15 arc sec | 16 arc sec | 18 arc sec | |
| 直线度\Straightness | ±4.5 μm | ±5.5 μm | ±6.5 μm | ±7.5 μm | ±8.5 μm | |
| 平面度\Flatness | ±4.5 μm | ±5.5 μm | ±6.5 μm | ±7.5 μm | ±8.5 μm | |
| 平台重量\Stage Mass(No Motor) | 16.3 kg | 18.1 kg | 19.9 kg | 22.5 kg | 24.6 kg | |
| 最大负载\Load Capacity | 水平 | 60 kg | ||||
| 竖直 | 40 kg | |||||
| 分辨率\Resolution | 光栅尺 | 1 nm, 10 nm, 0.1 μm | ||||
| 旋转编码器 | 0.5 μm | |||||
| 最小步进\Minimal Incremental Step | 100 nm（1），1 μm（2） | |||||
| 在位稳定性\In Position Stability | ±30 nm（1），±1μm（2） | |||||
| 最大速度\Maximum Speed（3） | 300 mm/s | |||||
| 平台材质\Material | 铝 | |||||
| 平均无故障时间\MTBF | 27,000 Hours | |||||
备注：
（1）适配-AS反馈；
（2）适配-2500线旋转编码器反馈；
（3）空载，需配置相应功率的放大器；
（4）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
（5）其他行程可定制。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 行程（mm） | 载物台 | 反馈 | 电缆管理 | 电机 |
| SMH190SD | -100 | -TTM | -AS | -CMS0 | -M200B |
| -150 | -TTR | -TTL010 | -CMS1 | -M200 | |
| -200 | -TTKxx | -TTL100 | -CMS2 | -M400 | |
| -250 | -RTTL2500 | -M400B | |||
| -300 | |||||
| -400 | |||||
| -500 | |||||
| -600 | |||||
| -700 | |||||
| -800 |
行程选项
| -100 | 100 mm 行程 |
| -150 | 150 mm 行程 |
| -200 | 200 mm 行程 |
| -250 | 250 mm 行程 |
| -300 | 300 mm 行程 |
| -400 | 400 mm 行程 |
| -500 | 500 mm 行程 |
| -600 | 600 mm 行程 |
| -700 | 700 mm 行程 |
| -800 | 800 mm 行程 |
载物台选项
| -TTM | 载物台公制安装孔 |
| -TTR | 载物台安装孔位，为指定转台设计 |
| -TTKxx | 为客户定制载物台 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -TTL010 | 10nm分辨率数字量TTL反馈信号输入 |
| -TTL100 | 0.1μm分辨率数字量TTL信号输入 |
| -RTTL2500 | 2500线旋转编码器 |
电缆管理选项
| -CMS0 | 无电缆管理，仅留出电机反馈接头 |
| -CMS1 | 单侧托线板、单拖链 |
| -CMS2 | 双侧托线板、双拖链 |
电机选项
| -M200B | 200W电机带抱闸 |
| -M200 | 200W电机 |
| -M400 | 400W电机 |
| -M400B | 400W电机带抱闸 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
| 型号 BASIC MODEL | 标称行程 NOMINAL TRAVEL | A | B |
| SMH190SD-100 | 100 | 390 | 175250 |
| SMH190SD-150 | 150 | 440 | 175250 |
| SMH190SD-200 | 200 | 490 | 175275 |
| SMH190SD-250 | 250 | 540 | 175275 |
| SMH190SD-300 | 300 | 590 | 175375 |
| SMH190SD-400 | 400 | 690 | 175450 |
| SMH190SD-500 | 500 | 790 | 175450 |
| SMH190SD-600 | 600 | 890 | 175575 |
| SMH190SD-700 | 700 | 990 | 175575 |
| SMH190SD-800 | 800 | 1090 | 175575975 |
备注：
（1）单位：mm；
（2）双侧拖链配置未显示。
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