The ART165V‑5 is a nanometer‑precision vertical lift stage driven by a linear motor with crossed‑roller guides, delivering excellent dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 150 Hz.

As a key complement to the ART series horizontal stages, the ART165V‑5 offers a wider table and greater load capacity than the ART130V‑5, and can be combined with the SMH165LM/SMH165SD linear stages to form various multi‑axis configurations. In demanding fast‑focusing applications, its outstanding dynamics meet stringent requirements. For example, in gene sequencing, with a 1.7 kg load, a 1 μm step settles to within ±50 nm in just 15 ms—including acceleration, deceleration, and settling—enabling rapid and accurate real‑time focusing.

Despite its compact design, the ART165V‑5 delivers robust performance, reaching a maximum speed of 75 mm/s and unloaded acceleration of 0.7 g. When equipped with linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 5 nm. Typical applications include fiber‑optic coupling, wafer defect inspection, gene sequencing, and more—with flexible customization available per customer needs.