The ASML series is a high‑precision air‑bearing direct‑drive rotary stage powered by a rotary motor, delivering excellent dynamic performance and positioning accuracy. Beyond industry‑leading axial, radial, and tilt error motion, it offers exceptional absolute angular accuracy, repeatability, and load capacity—making it easy to integrate into multi‑axis systems.

Featuring outstanding industrial design, the ASML is available with table diameters from 150 mm to 300 mm, with a thin profile while maintaining high performance. Equipped with high‑precision circular grating feedback, it achieves positioning accuracy better than 1 arcsec, with axial and radial runout below 250 nm. Powered by CoreTech’s proprietary direct‑drive motor with flexible sizing. With linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 0.5 arcsec. Typical applications include dimensional metrology, biological sample processing and observation, synchrotron research, precision manufacturing, optical alignment, and system calibration—wherever arcsec‑level positioning is required.