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SurfaceZ Series
Low‑Profile Direct‑Drive Vertical Lift Stage
The SurfaceZ is a nanometer‑precision vertical Z‑axis stage driven by a linear motor with crossed‑roller guides, delivering exceptional dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 200 Hz.
It serves as a key complement to the Surface series, combinable with the Surface‑Theta rotary stage or the Surface‑350‑350 planar air‑bearing stage to form multi‑axis systems. In high‑end semiconductor applications demanding stringent accuracy and geometry, the Surface series provides complete solutions. The SurfaceZ features a low profile, minimal Abbe error, and space‑saving design, with a built‑in pneumatic counterbalance supporting up to 15 kg loads—meeting the demands of heavy loads, high precision, and low height simultaneously.
Despite its compact size, the SurfaceZ delivers high positioning accuracy. When equipped with linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 5 nm. Typical applications include semiconductor lithography, inspection, packaging, profile metrology, and gene sequencing—with flexible customization available per customer requirements.
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Product Features
Hard-Core Capabilities Drive Exceptional Performance
High‑precision direct‑drive vertical lift stage
High dynamic performance
(unloaded crossover frequency > 120 Hz)
Low profile, ideal for space‑constrained applications
Built‑in pneumatic counterbalance, max load 15 kg
Combinable with Surface‑Theta or linear stages for multi‑axis systems
Resolution: 1 nm; repeatability: ±100 nm; accuracy: ±200 nm
In‑position stability: 5 nm
(with linear amplifiers and vibration‑isolated lab environment)
Specifications
Gain a comprehensive understanding of product information
| 平台型号\Model | Surface Z-005 | Surface Z-010 |
| 有效行程\Travel | 5 mm | 10mm |
| 定位精度\Accuracy | ±200 nm | ±300 nm |
| 双向重复定位精度\Bi-Repeatability | ±100 nm | ±150 nm |
| 俯仰\Pitch | 15 arc sec | 20 arc sec |
| 偏摆\Yaw | 15 arc sec | 20 arc sec |
| 直线度\Straightness（1） | ±1.5 µm | ±2 µm |
| 平台重量\Stage Mass | 4.5 kg | 5.5 kg |
| 最大负载\Load Capacity（2） | 8 kg | 8 kg |
| 分辨率\Resolution（3） | 1 nm | |
| 在位稳定性\In Position Stability （3） | 5 nm | |
| 最小步进量\Minimum Incremental step（3） | 5 nm | |
| 最大速度\Maximum Speed（4） | 5 mm/s | |
| 最大加速度\Maximum Acceleration（4） | 0.7 g | |
| 持续推力\Continuous Force | 23 N | |
| 峰值推力\Peak Force | 170 N | |
| 平台材质\Material | 铝 | |
| 平均无故障时间\MTBF | 27,000 Hours | |
备注：
（1）平行或垂直于楔形块方向测量；
（2）沿轴线方向受力；不带气动平衡负载能力为8kg；
（3）适配-AS反馈，配置线性放大器；
（4）空载测试；
（5）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
（6）其他行程可定制。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 行程（mm） | 反馈 |
| Surface Z | -005 | -AS |
| -010 |
行程选项
| -005 | 5mm行程升降台 |
| -010 | 10mm行程升降台 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
Surface Z-005
Surface Z-010
备注：
（1）单位：mm。
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