The CUBE‑4 is a 4‑axis (XYZT) integrated precision positioning stage. The XYZ axes are driven by linear motors with precision crossed‑roller guides, delivering exceptional performance and positioning accuracy—with an unloaded XY crossover frequency exceeding 120 Hz and excellent speed stability. At the stage top, with a 5 kHz interferometer sampling rate, the dynamic following error during constant‑velocity motion shows a standard deviation (STD) of less than 50 nm per 0.5 mm travel. The Z‑axis achieves an unloaded crossover frequency above 200 Hz. The Theta axis features a direct‑drive rotary motor with circular guide and scale, combining high speed and high precision. Its recessed, hidden design lowers the overall height, reducing the working point and improving absolute positioning accuracy in real‑world applications.

In addition, the Z‑axis can step 100 μm and settle to within ±50 nm in just 30 ms. The CUBE‑4 delivers both point‑to‑point static accuracy and outstanding dynamic precision, making it well‑suited for biological or wafer inspection scanning applications with stringent dynamic error requirements. The Z‑axis can be adjusted in real time based on sensor working distance, providing a comprehensive motion control solution.