.png)
.png)
CFT-XY Series
High‑Precision XY Integrated Motion Platform
The CFT‑XY series is a nanometer‑precision XY integrated positioning platform, driven by direct‑drive linear motors with precision crossed‑roller guides, delivering exceptional dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 100 Hz. The series features outstanding industrial design with well‑proportioned geometry, and achieves full‑stroke flatness and straightness within ±1.5 μm. The CFT‑200XY model, in particular, offers superior dynamics: when tracing a circular path of Ø2.2 mm at 40 mm/s, its dynamic following error is less than 0.5 μm, making it the preferred choice for precision laser processing and on‑the‑fly scanning inspection.
Despite its refined construction, the CFT‑XY provides robust driving capability, with the upper axis reaching a maximum speed of 800 mm/s and unloaded acceleration of 1 g. When equipped with linear amplifiers and ASH feedback in a vibration‑isolated laboratory environment, it achieves in‑position stability below 3 nm and a minimum step size of less than 5 nm. It is well‑suited for industrial and research applications requiring nanometer‑level positioning, such as metrology inspection, surface roughness testing, and laser cutting.
Download the Manual
Get a Quote
Product Features
Hard-Core Capabilities Drive Exceptional Performance
XY integrated direct‑drive stage
Dual‑axis four‑motor drive for superior dynamic performance
Crossed‑roller guides
Compact design, low profile, minimal Abbe error
Available travel: 200 mm × 200 mm and 300 mm × 300 mm
Resolution: 1 nm; repeatability: ±100 nm; accuracy: ±300 nm
In‑position stability: 3 nm
（With ASH feedback option and linear amplifiers）
Multiple feedback options
Specifications
Gain a comprehensive understanding of product information
| 型号 | CFT-200XY | CFT-300XY |
| 有效行程\Travel | 200mm*200mm | 300mm*300mm |
| 绝对定位精度\Accuracy | ±0.3 μm | ±0.5 μm |
| 双向重复定位精度\Bi-Repeatability | ±0.1 μm | ±0.15 μm |
| 俯仰\Pitch | 15 arc sec | 18 arc sec |
| 偏摆\Yaw | 8 arc sec | 10 arc sec |
| 直线度\Straightness | ±1.5 μm | ±2 μm |
| 平面度\Flatness | ±1.5 μm | ±2 μm |
| 正交性\Orthogonality (1) | 15 arc sec | 15 arc sec |
| 最大速度\Maximum Speed （2） | 800 mm/s | 800 mm/s |
| 最大加速度\Maximum Acceleration （2） | 1.5 g | 1.5 g |
| 持续推力\Continuous Force | 48.8 N | 163.6 N |
| 峰值推力\Peak Force | 340.8 N | 1013.2 N |
| 最大负载\Load Capacity | 20 kg | 30 kg |
| 平台重量\Stage Mass(No Motor) | 27.9 kg | 70 kg |
| 电子分辨率\Resolution （3） | 1 nm | |
| 最小步进量\Minimum Incremental step（3） | 5 nm | |
| 在位稳定性\In Position Stability （3） | 3 nm | |
| 平台材质\Material | 铝 | |
| 平均无故障时间\MTBF | 27,000 Hours | |
备注：
（1）经过定制2D校准后，正交性可达到 5 arc sec；
（2）空载，需配置相应功率的放大器；
（3）适配-ASH反馈，线性放大器；
（4）默认测试点位置为台面上方25 mm，单轴指标，多轴系统的性能指标与实际载荷和工作点位置有关；
（5）其他行程可定制。
Model Selection and Configuration
Scientifically Formulated, Precisely Tailored to Your Needs
| 产品系列 | 行程（mm） | 反馈 |
| CFT-XY | -200XY | -AS |
| -300XY | -ASH | |
| -TTL005 | ||
| -TTL010 | ||
| -TTL020 | ||
| -TTL100 |
行程选项
| -200XY | 200mmx200mm行程 |
| -300XY | 300mmx300mm行程 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -ASH | 高精度VPP 1伏正弦模拟量输入 |
| -TTL005 | 5 nm分辨率数字量TTL信号输入 |
| -TTL010 | 10 nm分辨率数字量TTL信号输入 |
| -TTL020 | 20 nm分辨率数字量TTL信号输入 |
| -TTL100 | 0.1μm分辨率数字量TTL信号输入 |
Product Dimensions
Precise measurements—dimensions are clear at a glance
CFT-200XY
CFT-300XY
备注：
（1）单位：mm；
（2）线缆管理未显示。
Related Products
Need help with product selection or a quote?
Contact us to build your customized precision motion solution.
Leave a message now.
Submit Form