ACT85LM系列
Driven by a linear motor, the ACT85LM series offers high speed, excellent dynamic performance, and low friction, enabling precise position control—ideal for long‑stroke, high‑speed, and high‑accuracy applications.
Equipped with high‑resolution linear encoders (electronic resolution down to 1 nm), the stage can achieve sub‑micron repeatability and positioning accuracy through calibration. Low‑friction side seals protect against dust and particle contamination, ensuring reliable long‑term operation and extended maintenance intervals. Cable management options, a rugged metal cover, and a sleek design enhance aesthetics while simplifying daily maintenance.
The ACT85LM series is a key component in precision machinery, widely used in OLED cutting, PCB drilling, CNC machining, biotechnology, IC packaging equipment, surface topography measurement, and more. It delivers precise positioning, high speed, and heavy‑load capability in a compact form factor.
Product Features
Direct‑drive linear motor for high‑precision positioning
Rugged mechanical construction
Flexible configuration options (various travels and feedback choices)
Travel range from 50 mm to 800 mm
Max speed up to 2000 mm/s, max acceleration up to 2 g
Configurable with dual movers for increased throughput and efficiency
Optional single‑ or double‑sided cable management
Specifications
| 平台型号\Model | ACT85LM-050 | ACT85LM-100 | ACT85LM-150 | ACT85LM-200 | ACT85LM-300 | |
| 有效行程\Travel | 50mm | 100mm | 150mm | 200mm | 300mm | |
| 绝对定位精度\Accuracy | ±0.5μm | ±1μm | ±1μm | ±1.5μm | ±2μm | |
| 双向重复定位精\Bi-Repeatability | ±0.3μm | ±0.3μm | ±0.5μm | ±0.5μm | ±1μm | |
| 平台重量\Stage Mass | 4.3kg | 4.8kg | 5.2kg | 5.6kg | 6.6kg | |
| 最大负载\Load Capacity | 水平\Horizontal | 20kg | ||||
| 侧向\Side | 10kg | |||||
| 分辨率\Resolution(1) | 1nm | |||||
| 最小步进\Minimal Incremental Stap(1) | 75nm | |||||
| 最大速度\Maximum Speed(2) | 2m/s | |||||
| 最大加速度\Maximum Acceleration(2) | 2g | |||||
| 持续推力\Continuous Force | 31N | |||||
| 峰值推力\Peak Force | 217N | |||||
| 平台材质\Material | 铝 | |||||
| 平均无故障时间\MTBF | 27,000Hours | |||||
| 平台型号\Model | ACT85LM-400 | ACT85LM-500 | ACT85LM-600 | ACT85LM-700 | ACT85LM-800 | |
| 有效行程\Travel | 400mm | 500mm | 600mm | 700mm | 800mm | |
| 绝对定位精度\Accuracy | ±2μm | ±3μm | ±3μm | ±3μm | ±3μm | |
| 双向重复定位精\Bi-Repeatability | ±1μm | ±1μm | ±1μm | ±1μm | ±1μm | |
| 平台重量\Stage Mass | 7.6kg | 8.5kg | 9.4kg | 10.3kg | 11.2kg | |
| 最大负载\Load Capacity | 水平\Horizontal | 20kg | ||||
| 侧向\Side | 10kg | |||||
| 分辨率\Resolution(1) | 1nm | |||||
| 最小步进\Minimal Incremental Stap(1) | 75nm | |||||
| 最大速度\Maximum Speed(2) | 2m/s | |||||
| 最大加速度\Maximum Acceleration(2) | 2g | |||||
| 持续推力\Continuous Force | 31N | |||||
| 峰值推力\Peak Force | 217N | |||||
| 平台材质\Material | 铝 | |||||
| 平均无故障时间\MTBF | 27,000Hours | |||||
备注:
(1)适配-AS反馈,以及16位反馈细分;
(2)空载,需配置相应功率的放大器;
(3)默认测试点位置为台面上方25 mm,单轴指标,多轴系统的性能指标与实际载荷和工作点位置有关;
(4)双动子可安装ART系列Y轴。
Model Selection and Configuration
| 产品系列 | 行程(mm) | 载物台 | 反馈 | 电缆管理 |
| ACT85LM | -50 | -TTM | -AS | -CMS0 |
| -100 | -TTR | -TTL100 | -CMS1 | |
| -150 | -TTKxx | -CMS2 | ||
| -200 | ||||
| -300 | ||||
| -400 | ||||
| -500 | ||||
| -600 | ||||
| -700 | ||||
| -800 |
行程选项
| -50 | 50mm行程 |
| -100 | 100mm行程 |
| -150 | 150mm行程 |
| -200 | 200mm行程 |
| -300 | 300mm行程 |
| -400 | 400mm行程 |
| -500 | 500mm行程 |
| -600 | 600mm行程 |
| -700 | 700mm行程 |
| -800 | 800mm行程 |
载物台选项
| -TTM | 载物台公制安装孔 |
| -TTR | 载物台安装孔位,为指定转台设计 |
| -TTKxx | 为客户定制载物台 |
反馈选项
| -AS | VPP 1伏正弦模拟量输入 |
| -TTL100 | 0.1μm分辨率数字量TTL信号输入 |
电缆管理选项
| -CMS0 | 无电缆管理,仅留出电机反馈接口 |
| -CMS1 | 单侧托线板、单拖链 |
| -CMS2 | 双侧托线板、双拖链 |
Product Dimensions
| 型号 BASIC MODEL | 标称行程 NOMINAL TRAVEL | A | B |
| ACT85LM-050 | 50 | 280 | 100 |
| ACT85LM-100 | 100 | 330 | 100220 |
| ACT85LM-150 | 150 | 380 | 100220 |
| ACT85LM-200 | 200 | 430 | 100340 |
| ACT85LM-300 | 300 | 530 | 100400 |
| ACT85LM-400 | 400 | 630 | 100400 |
| ACT85LM-500 | 500 | 730 | 100400600 |
| ACT85LM-600 | 600 | 830 | 100400700 |
| ACT85LM-700 | 700 | 930 | 100400700 |
| ACT85LM-800 | 800 | 1030 | 100400700900 |

备注:
(1)单位:mm;
(2)双侧拖链配置未显示。
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