The LPAR series is a large‑clear‑aperture, high‑precision 360° continuous rotary stage powered by a direct‑drive motor, delivering excellent dynamic performance and positioning accuracy. Compared with conventional worm‑gear stages, it offers higher speed, zero gear backlash, and superior positioning accuracy and repeatability. Featuring outstanding industrial design with thin‑section bearings to reduce friction and save space, it is equipped with high‑precision circular grating feedback, achieving positioning accuracy of ±3 arcsec and repeatability below ±1.5 arcsec, with a maximum horizontal load capacity of 70 kg—demonstrating outstanding mechanical performance.

The LPAR series features a large‑diameter bearing design that ensures high system stiffness and excellent repeatability—without performance degradation even under heavy loads. With linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability and minimum step size below 0.05 arcsec.

The LPAR series offers flexible configuration options, including analog or digital feedback. For semiconductor applications, it is available with rotary unions and air tubing to effectively address cable tangling during 360° continuous rotation, and optional limit switches for travel restriction. Thanks to its large clear aperture, low profile, high precision, excellent repeatability, and strong load capacity, the LPAR is widely used in semiconductor inspection and packaging applications.