The CFTCA series is a nanometer‑precision XY integrated positioning platform, driven by linear motors with precision crossed‑roller guides, delivering exceptional dynamic performance and positioning accuracy—with an unloaded crossover frequency exceeding 100 Hz. The series features outstanding industrial design with well‑proportioned geometry. The CFTCA‑150XY achieves full‑stroke flatness and straightness within ±2 μm with a clear aperture of 40 mm × 40 mm, while the CFTCA‑250XY offers ±4 μm flatness/straightness and a 50 mm × 50 mm clear aperture—making it a critical component in optical metrology and inspection applications.

Despite its compact and refined construction, the CFTCA provides robust driving capability, with the upper axis reaching a maximum speed of 1000 mm/s and unloaded acceleration of 1 g. When equipped with linear amplifiers in a vibration‑isolated laboratory environment, it achieves in‑position stability of 3 nm and a minimum step size below 5 nm. Thanks to its hollow design, it is widely used in double‑sided measurement and inspection, biological sample processing and observation, film and ink thickness measurement, and other industrial and research applications requiring nanometer‑level positioning combined with a through‑hole configuration.