ASP Series Ultra‑High‑Speed, High‑Precision Air‑Bearing Rotary Stage – Maximum Speed 5000 RPM

Air‑bearing rotary stages operate on the principle of gas dynamics, achieving non‑contact support between the stage and its base. This significantly reduces friction and wear, thereby enhancing rotational accuracy and stability. With advantages including high speed, high precision, friction‑free operation, no wear, low noise, and elimination of lubricant requirements, combined with excellent speed control performance, air‑bearing rotary stages are widely used in precision machining, optical inspection, semiconductor manufacturing, and other fields.

Coretech's newly launched ultra‑high‑speed, high‑precision air‑bearing rotary stage, the ASP Series, is available in two tabletop diameters – 100 mm and 150 mm – to suit different application scenarios. Equipped with high‑precision circular grating position feedback, it achieves positioning accuracy better than ±1.5 arc seconds, with axial and radial runout of less than 250 nm, demonstrating outstanding mechanical performance.

In wafer defect inspection applications, extremely high rotational speeds are typically required, together with exceptional rotational accuracy. Combining a high‑precision linear‑motor‑driven X‑axis with a linear‑motor‑driven air‑bearing rotary stage to enable wafer inspection under high‑speed rotation is a highly effective solution.

Typical spiral motion trajectory

During spiral scanning of a wafer, to ensure measurement accuracy, it is essential that the sampling points of the image sensor are as uniformly spaced as possible. Since the wafer is in a rotating state, only the angular velocity of the rotary stage can be controlled. To achieve uniform sampling by the image sensor, the linear velocity of the measured object within the sensor's field of view must be uniform. This requires the motion mechanism not only to accurately trace the spiral trajectory, but also to generate trigger signals with specific levels at precise positions. This presents significant challenges to both the mechanical performance and the drive/control capabilities of the motion system. The ASP Series rotary stage is exceptionally well‑suited for such applications.

Spiral motion

ASP转台实测数据