ZTT‑V2 Three‑Axis Tip‑Tilt Stage: Real‑Time Height and Angle Adjustment to Boost Precision Across Multiple Industries

In the fields of precision manufacturing and inspection, every small step forward in accuracy represents a major technological leap. Whether it is real‑time autofocus in wafer inspection or micron‑/nanometre‑level alignment between optical components, the ultimate performance of motion control platforms is constantly tested.

To meet this challenge, Geocentric Technology presents the newly upgraded ZTT‑V2 Series Three‑Axis Tip‑Tilt Stage. With an integrated monolithic design and core in‑house technologies, it redefines the high‑performance balance between precision, response speed, and structural rigidity.

01 Product Introduction

As an integrated three‑axis precision positioning platform combining vertical lift and horizontal levelling, the ZTT‑V2 is driven by self‑developed linear motors and employs precision spherical hinge coupling technology, delivering exceptional fine‑motion accuracy and dynamic performance. The stage features a low overall height, compact structure, excellent rigidity, a load capacity of 10 kg, and compatibility with cleanroom environments.

In addition to point‑to‑point static positioning accuracy, the ZTT‑V2 also excels in dynamic accuracy, making it suitable for applications that demand stringent fine‑motion and dynamic following error performance, such as wafer defect inspection, optical alignment, panel inspection, and maskless lithography. It adjusts height and angular posture in real time based on the sensor focus height, providing comprehensive solutions to customers' motion control challenges.

02 Product Features

• Integrated Z‑lift and tip‑tilt levelling platform

• Spherical hinge structure enabling multi‑axis coordinated control

• Compact construction with low lateral height

• Z‑axis micro‑step: 20 nm; Tip‑tilt micro‑step: 0.05 arc sec

• Self‑developed linear motor drive with excellent dynamic performance

Z‑axis 20 nm step response

In‑position stability of each axis

03 Product Dimensions and Specifications

Remarks:
(1) No‑load condition; requires an appropriately rated amplifier.
(2) Default measurement point is 25 mm above the stage top surface.

04 Application Scenarios