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Wafer Defect Inspection

Wafer Defect Inspection

Semiconductor manufacturing involves complex processes, and rigorous inspection is required at nearly every step to ensure quality. Defective dies that slip through to subsequent stages not only compromise overall product quality but also drive up production costs significantly.

To address wafer surface defect and dimensional inspection needs, CoreTech offers a range of motion stages with diverse performance options for automated inspection equipment integrators. Supported inspection modes include serpentine on‑the‑fly linear scanning, area‑array camera point‑to‑point region inspection, and high‑speed spiral trajectory scanning—enabling accurate and efficient wafer screening.


Recommended Products

ASP系列
ASP系列
ASP系列 ASP系列

High‑precision, high‑speed air‑bearing rotary stage – especially suitable for spiral scanning, with tested maximum speed up to 6,000 rpm.

Surface系列
Surface系列
Surface系列 Surface系列

High‑precision planar air‑bearing stage with excellent dynamic performance – combinable with SurfaceZ and SurfaceTheta to form X‑Y‑Z‑Theta multi‑axis systems, adaptable to wafers of different sizes and process requirements.

ONEXY系列
ONEXY系列
ONEXY系列 ONEXY系列

High‑rigidity, modular XY direct‑drive motion stage – paired with Z‑axis auto‑focus to significantly boost inspection throughput.

ZTT-V2系列
ZTT-V2系列
ZTT-V2系列 ZTT-V2系列

Integrated precision leveling module – featuring Z lift and θx/θy tilt compensation, ensures every inspection point lies precisely within the objective focal plane, guaranteeing imaging clarity and measurement repeatability across the entire wafer.

Empowerment Case Studies

One Article Summary | Multiple Applications of Precision Motion Stages in Wafer Defect Inspection Breaking the Boundaries of Chip Yield Improvement: Geocentric Technology's Wafer Spiral Inspection Solution Accelerates Quality and Efficiency in the Industry Wafer Defect Inspection: Solving the "Auto‑Focus Tracking" Challenge to Improve Detection Accuracy and Efficiency
One Article Summary | Multiple Applications of Precision Motion Stages in Wafer Defect Inspection
One Article Summary | Multiple Applications of Precision Motion Stages in Wafer Defect Inspection One Article Summary | Multiple Applications of Precision Motion Stages in Wafer Defect Inspection

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Breaking the Boundaries of Chip Yield Improvement: Geocentric Technology's Wafer Spiral Inspection Solution Accelerates Quality and Efficiency in the Industry
Breaking the Boundaries of Chip Yield Improvement: Geocentric Technology's Wafer Spiral Inspection Solution Accelerates Quality and Efficiency in the Industry Breaking the Boundaries of Chip Yield Improvement: Geocentric Technology's Wafer Spiral Inspection Solution Accelerates Quality and Efficiency in the Industry

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Wafer Defect Inspection: Solving the "Auto‑Focus Tracking" Challenge to Improve Detection Accuracy and Efficiency
Wafer Defect Inspection: Solving the "Auto‑Focus Tracking" Challenge to Improve Detection Accuracy and Efficiency Wafer Defect Inspection: Solving the "Auto‑Focus Tracking" Challenge to Improve Detection Accuracy and Efficiency

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