Laser Processing Automation Solutions – Laser Micro/Nano Machining

Femtosecond laser micro/nano machining systems based on two‑photon absorption exploit the advantages of the two‑photon polymerisation process, including good material penetration and high spatial selectivity. These systems are widely used in numerous cutting‑edge research fields both domestically and internationally, such as photonic crystals, metamaterials, stealth materials, life sciences, cell culture scaffolds, microfluidics, biochips, microsystems, micro‑optics, and bionics. Such applications typically require handling components of 100 mm or smaller. Coretech's 1‑ to 3‑axis motion stages are well‑suited to the requirements of such laser processing, with direct‑drive nano‑positioning stages capable of achieving sub‑micrometre resolution and positioning accuracy.

• Nanometre‑level positioning accuracy

• High dynamic performance (cut‑off frequency >100 Hz)

• Cross‑roller guides

• Flexible configuration options (XY with customisable unequal travels available)

• Compact structure, XY integrated design

• Resolution: 1 nm; repeatability: ±100 nm; positioning accuracy: ±250 nm

• In‑position stability: 3 nm

<3 nm in‑position stability test (configured with linear amplifier)

• Nanometre‑level positioning accuracy

• Pneumatic cylinder counterbalancing for superior dynamic performance (cut‑off frequency >100 Hz)

• Cross‑roller guides

• Flexible configuration options (various travels and feedback)

• Resolution: 1 nm; repeatability: ±100 nm; positioning accuracy: ±200 nm

• In‑position stability: 3 nm

• Can be combined to form XYZ 3‑axis systems

• 20° large‑angle direct‑drive tip‑tilt stage

• Brushless, slotless servo motor – zero friction, zero backlash

• High‑precision circular grating position feedback (resolution 0.1 arc sec)

• High speed (150°/s)

• Excellent in‑position stability (< ±0.5 arc sec)

• Compact design (self‑weight <1.5 kg)

• Optional rotation radii: 50 mm and 90 mm

• Direct‑drive air‑bearing stage

• High dynamic performance (cut‑off frequency >120 Hz)

• Air‑cushion preloading, zero friction

• High‑rigidity and heavy‑load design

• Resolution: 1 nm; repeatability: ±0.1 μm; positioning accuracy: ±0.2 μm

• Air‑gap averaging effect; straightness/flatness up to ±0.5 μm per 100 mm

• Travel up to 500 mm with cable management

• Optional high‑precision zero‑expansion grating feedback