Mask Inspection

The mask (photomask) is a critical component in the lithography process—its quality directly determines the outcome of subsequent patterning steps. Therefore, after mask fabrication, rigorous inspection is mandatory to ensure all performance metrics meet process requirements.

In this application, CoreTech’s large‑hollow‑bore high‑precision motion stage provides a stable positioning and smooth scanning foundation for mask inspection equipment. It enables the inspection system to perform high‑resolution imaging and defect capture efficiently and accurately across the entire mask surface, guaranteeing reliability and process compatibility for every mask.