Laser Processing Automation Solutions – Laser Direct Writing and Plate‑Making Lithography

The production and manufacturing of integrated circuits is an extremely complex process, among which lithography technology is one of the most sophisticated. In addition to digital lithography techniques, micro/nano direct‑write lithography systems rely heavily on ultra‑precision motion stages. Coretech's motion platforms are widely used in PCB direct imaging equipment, pan‑semiconductor direct‑write lithography systems, and other laser direct imaging equipment.

CFT Series XY Linear Stage

• XY integrated direct‑drive stage

• Dual‑axis, four‑motor drive for outstanding dynamic performance

• Cross‑roller guides, straightness within ±2 μm over 300 mm

• Compact structure, low lateral height, reduced Abbe error

• Travel options: 200 mm × 200 mm and 300 mm × 300 mm

• Resolution: 1 nm; repeatability: ±100 nm; positioning accuracy: ±400 nm

• Stepping axis in‑position stability: 3 nm (configured with ASH feedback option and linear amplifier)

• Multiple feedback options: AS, ASH, TTL, etc.

Surface Series Planar Air‑Bearing Stage

• High dynamic performance (cut‑off frequency >330 Hz)

• H‑type structure with air guideways on both dual‑drive axes and the beam axis

• XY planar design, low lateral height, reduced Abbe error

• Maximum speed: 2 m/s; maximum acceleration: 2 g

• Resolution: 1 nm; in‑position stability: ±8 nm

• Pitch and yaw: <3 arcsec

• Repeatability: ±100 nm; positioning accuracy: ±250 nm

• Equipped with high‑precision zero‑coefficient‑of‑thermal‑expansion grating feedback – low expansion coefficient, minimal thermal drift susceptibility

• Can be combined with Surface Z and Surface Theta to form a 4‑axis system

• Customisable travel

Surface Z Series Z‑Lift Stage

• High‑precision voice‑coil motor drive, no‑load cut‑off frequency >120 Hz

• Achieves excellent dynamic performance: 1 μm step with settling to ±50 nm within 15 ms

• Load counterbalancing based on customer payload – no air supply counterbalance required

• Outstanding dynamic performance; auto‑focus accuracy <100 nm

• In‑position stability: 10 nm, ensuring high‑frequency distance‑measurement focusing

• Can be integrated with precision chucks to reduce customer integration effort

Surface Theta Series Rotary Stage

• High‑precision direct‑drive rotary stage

• Compact structure, low lateral height

• Heavy load capacity with high precision

• Optional digital or analogue high‑precision circular grating position feedback

• Brushless, slotless servo motor direct drive, speed exceeding 400 rpm

• Minimum step: 0.05 arc sec; repeatability: ±1 arc sec

• Rich configuration options, including pneumatic rotary unions and limit switches